Innovative Manufacturing of Low-Cost RF MEMS

Award Information
Agency: Department of Defense
Branch: Missile Defense Agency
Contract: DASG6003P0086
Agency Tracking Number: 022-0680
Amount: $68,452.00
Phase: Phase I
Program: SBIR
Awards Year: 2002
Solicitation Year: N/A
Solicitation Topic Code: N/A
Solicitation Number: N/A
Small Business Information
3000 Custer Road Suite 270-400, Plano, TX, 75075
DUNS: 088468702
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 David Forehand
 VP Technology Development
 (972) 740-0795
Business Contact
 Chuck Goldsmith
Title: President
Phone: (214) 552-7055
Research Institution
"Recent advances in electronic device technology, specifically microelectromechanical systems for RF frequencies (RF MEMS), have resulted in the development of near-ideal electronic switches for controlling and routing RF energy. These switches requirenegligible power consumption, have extremely low insertion loss, and extremely high linearity, which far exceeds that obtainable with pin diode or GaAs FET switch technology. The power reductions over pin diode technology, and size and weight reductionsover ferrite phase shifters offer dramatic improvements in prime power consumption, size, and weight for future military missions, especially for airborne and space-based systems.Though RF MEMS have demonstrated world-class performance in phase shifters and filters, they still require further development. Currently, there are three major issues at the forefront of RF MEMS development: cost, reliability, and packaging. Toameliorate the cost and reliability issues, during Phase I MEMtronics will: 1) Investigate alternative, low-cost manufacturing approaches to fabricating RF MEMS devices; 2) Develop a process technology roadmap for implementing these potential low-costmanufacturing approaches; and 3) Develop a first order manufacturing cost model. During Phase II, MEMtronics will demonstrate manufacturing and design improvements which will lead to a 5-10X reduction in cost. Anticipated benefits of the proposedmanufacturing techniques f

* Information listed above is at the time of submission. *

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