Low-Cost Fabrication of Pyroelectric thin films for IR Sensors by Combustion CVD

Award Information
Agency: National Aeronautics and Space Administration
Branch: N/A
Contract: NAS1-02029
Agency Tracking Number: 012355
Amount: $70,000.00
Phase: Phase I
Program: SBIR
Awards Year: 2002
Solicitation Year: N/A
Solicitation Topic Code: N/A
Solicitation Number: N/A
Small Business Information
5315 Peachtree Industrial Blvd., Chamblee, GA, 30341
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Yongdong Jiang
 Principal Investigator
 (678) 287-2477
Business Contact
 Jeffrey Moore
Title: Chief Operating Officer
Phone: (678) 287-2403
Email: jmoore@microcoating.com
Research Institution
Stimulated by the rapidly increasing commercial and military applications, the U.S. infrared sensor market will double from 1994 to 2001, will be over $1.3 billion by the year of 2001 with an annual growth rate of about 12% as predicted by Frost & Sullivan. Reduction in cost, size, weight and power consumption is crucial to both commercial and military applications. In addition, integrated devices and systems compatible with typical semiconductor process are becoming more and more needed. To meet these requirements, pyroelectric thin films are being used to develop new classes of infrared sensors with high sensitivity, low noise, low power consumption and smaller size. Using its innovative, high volume, low cost and open-air Combustion Chemical Vapor Deposition (CCVD) technique, MCT?s proposed Phase I program is to deposit dense, textured pyroelectric thin films on single crystal substrates for the applications of infrared (IR) sensors for non-contact temperature measurement, gas analysis, IR imaging, etc. and to evaluate the chemical, dielectric and pyroelectric properties of these films.

* Information listed above is at the time of submission. *

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