Innovative Nanoimprint Tools for Optoelectronic Applications

Award Information
Agency: Department of Defense
Branch: Defense Advanced Research Projects Agency
Contract: DAAH0102CR067
Agency Tracking Number: 01SB2-0141
Amount: $98,990.00
Phase: Phase I
Program: SBIR
Awards Year: 2001
Solicitation Year: N/A
Solicitation Topic Code: N/A
Solicitation Number: N/A
Small Business Information
1406 Camp Craft Rd., Austin, TX, 78746
DUNS: 039399196
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Byung-Jin Choi
 Senior Staff Engineer
 (512) 899-8539
Business Contact
 Norman Schumaker
Title: Chief Executive Officer
Phone: (512) 899-8539
Research Institution
Molecular Imprints, Inc. (MII) is a startup company in Austin, Texas, set up to develop and manufacture a unique line of nano-resolution lithography and associated semiconductor equipment based on a proprietary new technology developed at the University ofTexas at Austin. MII has acquired exclusive rights to the intellectual property associated with Step and Flash Imprint Lithography (S-FIL) technology. S-FIL technology has the potential for being a low-cost, sub-50 nm, high-throughput process that hasbeen carefully designed to substantially exploit the existing infrastructure in the semiconductor industry.MII would like to investigate the extension of S-FIL technology to the area of compound semiconductor substrates. These materials are known to be fragile, and have significant material compatibility issues at high temperatures. This proposed effort willexplore the development of novel nanoimprint tools for processing compound semiconductor wafers without the use of high pressures and temperatures. The proposed research will lead to nano-lithography tools that can reliably and repeatably allow patterning of compound semiconductor devices with high process yields.

* Information listed above is at the time of submission. *

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