Innovative Nanoimprint Tools for Optoelectronic Applications

Award Information
Agency:
Department of Defense
Branch
Defense Advanced Research Projects Agency
Amount:
$98,990.00
Award Year:
2001
Program:
SBIR
Phase:
Phase I
Contract:
DAAH0102CR067
Award Id:
53332
Agency Tracking Number:
01SB2-0141
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
1406 Camp Craft Rd., Austin, TX, 78746
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
039399196
Principal Investigator:
Byung-JinChoi
Senior Staff Engineer
(512) 899-8539
bjc@molecularimprints.com
Business Contact:
NormanSchumaker
Chief Executive Officer
(512) 899-8539
nes@molecularimprints.com
Research Institute:
n/a
Abstract
Molecular Imprints, Inc. (MII) is a startup company in Austin, Texas, set up to develop and manufacture a unique line of nano-resolution lithography and associated semiconductor equipment based on a proprietary new technology developed at the University ofTexas at Austin. MII has acquired exclusive rights to the intellectual property associated with Step and Flash Imprint Lithography (S-FIL) technology. S-FIL technology has the potential for being a low-cost, sub-50 nm, high-throughput process that hasbeen carefully designed to substantially exploit the existing infrastructure in the semiconductor industry.MII would like to investigate the extension of S-FIL technology to the area of compound semiconductor substrates. These materials are known to be fragile, and have significant material compatibility issues at high temperatures. This proposed effort willexplore the development of novel nanoimprint tools for processing compound semiconductor wafers without the use of high pressures and temperatures. The proposed research will lead to nano-lithography tools that can reliably and repeatably allow patterning of compound semiconductor devices with high process yields.

* information listed above is at the time of submission.

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