Innovative, High-Throughput, Large-Area, Versatile Nanoimprint Tools

Award Information
Agency: Department of Defense
Branch: Defense Advanced Research Projects Agency
Contract: DAAH0102CR059
Agency Tracking Number: 01SB2-0142
Amount: $99,000.00
Phase: Phase I
Program: SBIR
Awards Year: 2001
Solitcitation Year: N/A
Solitcitation Topic Code: N/A
Solitcitation Number: N/A
Small Business Information
NANONEX CORP.
7 FOULET DRIVE, PRINCETON, NJ, 08540
Duns: 108972048
Hubzone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Linshu Kong
 Project Manager
 (609) 683-3973
 lkong@nanonex.com
Business Contact
 Lin Chou
Title: President
Phone: (609) 683-3973
Email: linchou@nanonex.com
Research Institution
N/A
Abstract
Based on the previous extensive work on NIL in Prof. Chou's group and at Nanonex Corporation, the objective of the project is to further develop a promising innovative nanoimprint lithography (NIL) machine design. The design, using a new principle, offersnot only excellent uniformity of nanostructures over large areas, high-throughput (<60 sec per wafer), and scalable to 12

* information listed above is at the time of submission.

Agency Micro-sites

US Flag An Official Website of the United States Government