In-situ, Real-Time Process Characterization and Control in Nanoimprint Lithography and In-Situ Template Cleaning

Award Information
Agency:
Department of Defense
Branch
Defense Advanced Research Projects Agency
Amount:
$98,905.00
Award Year:
2004
Program:
SBIR
Phase:
Phase I
Contract:
W31P4Q-04-C-R208
Award Id:
68829
Agency Tracking Number:
04SB1-0519
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
7 FOULET DRIVE, PRINCETON, NJ, 08540
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
108972048
Principal Investigator:
Larry Koecher
COO
(732) 355-1600
lkoecher@nanonex.com
Business Contact:
Larry Koecher
COO
(732) 355-1600
lkoecher@nanonex.com
Research Institute:
n/a
Abstract
The goal of the project is to (a) further develop an innovative in-situ real-time characterization tool for nanoimprint lithography (NIL) processes and (b) in-situ template cleaning using a laser beam. The characterization tool is based on real-time diffractive scatterometry and can measure many important imprint parameters (e.g. imprint depth, imprint speed, the resist deformations, etc) in-situ and real time. The tool can uniquely and significantly enhance the performance and yields of NIL. The innovative method is based on some recent developments at Prof. Chou's group and licensed to Nanonex Corporation.

* information listed above is at the time of submission.

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