SBIR Phase I: Development of Innovative Nanoimprint Machines Based on Electrostatic-Force Assisted NIL (EFAN)

Award Information
Agency: National Science Foundation
Branch: N/A
Contract: 0512718
Agency Tracking Number: 0512718
Amount: $99,982.00
Phase: Phase I
Program: SBIR
Awards Year: 2005
Solicitation Year: N/A
Solicitation Topic Code: N/A
Solicitation Number: N/A
Small Business Information
7 Foulet Drive, Princeton, NJ, 08540
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Wei Zhang
 (732) 355-1600
Business Contact
 Larry Koecher
Title: Mr
Phone: (732) 355-1600
Research Institution
This Small Business Innovation Research (SBIR) Phase I research project will investigate the critical issues and feasibility of developing new Nano-Imprint Lithography (NIL) machines using an innovative approach in pressing a mold into the resist. The new approach, coined electrostatic force assisted NIL (EFAN) that uses an electrostatic force rather than mechanical forces or fluidic forces, can overcome many short-comings of the current pressing methods for NIL, offering a broad range of unique advantages, such as more precise alignment accuracy, better imprint uniformity, higher throughput, simpler machine design, and better machine reliability. The proposed research will significantly and broadly impact nano-manufacturing tools as well as nanotechnology product developments, and impact the next generation lithography tools for IC manufacturing.

* Information listed above is at the time of submission. *

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