SBIR Phase II: Bulk AlN Growth For III-Nitride Devices

Award Information
Agency: National Science Foundation
Branch: N/A
Contract: 0924013
Agency Tracking Number: 0740546
Amount: $493,733.00
Phase: Phase II
Program: SBIR
Awards Year: 2009
Solicitation Year: N/A
Solicitation Topic Code: EL
Solicitation Number: NSF 07-586
Small Business Information
Nitek Incorporated
1804 Salem Church Rd, Irmo, SC, 29063
DUNS: 167443170
HUBZone Owned: N
Woman Owned: Y
Socially and Economically Disadvantaged: N
Principal Investigator
 Qhalid Fareed
 (803) 960-1239
Business Contact
 Qhalid Fareed
Title: PhD
Phone: (803) 960-1239
Research Institution
This award is funded under the American Recovery and Reinvestment Act of 2009 (Public Law 111-5). This Small Business Innovation Research Phase II project will result in the development of a novel semiconductor growth technique to produce low dislocation density III-nitride AlInGaN substrate materials for high efficiency deep UVLEDs and electronic devices. This novel growth technique termed Metalorganic Hydride Vapor Phase Epitaxy (MOHVPE) is a hybrid of Metalorganic Chemical Vapor Deposition (MOCVD), used for device growth where atomic layer accuracy is required, and Hydride Vapor Phase Epitaxy (HVPE), used for fast bulk growth. Their combination in a single growth reactor allows for the growth of very thick, low dislocation density films as substrates templates. Then the growth mode can be switched to the metalorganic sources to grow atomically controlled device active layers, such as quantum wells, without taking the wafer out of the growth chamber. The MOHVPE AlGaN substrate technology will lead to higher efficiency Power Electronics and deep UV LEDs. Deep UV LEDs offer the potential to greatly increase our understanding of the interaction between UV light and biological/microbiological species. This is increasingly important as we confront the global trends of an aging population (healthcare), increased population density leading to greater pathogen exposure and water shortages, and greater cross-border travel. Researchers are just beginning to investigate applications for UV radiation including cancer treatment, increased plant/food yield, and genetic modification with an increasing interest based on the ability to more controllably deliver UV radiation to particular points of interest that has been enabled by UV LEDs.

* information listed above is at the time of submission.

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