MEMS based thermopile infrared detector array for chemical and biological sensing

Award Information
Agency:
Department of Defense
Branch
Army
Amount:
$99,965.00
Award Year:
2010
Program:
STTR
Phase:
Phase I
Contract:
W911NF-10-C-0121
Award Id:
94880
Agency Tracking Number:
A10A-004-0430
Solicitation Year:
n/a
Solicitation Topic Code:
ARMY 10T004
Solicitation Number:
n/a
Small Business Information
12930 Morris Trail, Colorado Springs, CO, 80908
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
621633296
Principal Investigator:
Stephen Gaalema
President
(719) 593-9501
sgaalema@bfe.com
Business Contact:
Vivian McDonald
Office Administrator
(719) 593-9501
vmcdonald@bfe.com
Research Institute:
Case Western Reserve University
Derek M Humphrey
Office of Sponsored Projects
10900 Euclid Avenue
Cleveland, OH, 44106
(216) 368-4510
Nonprofit college or university
Abstract
Thermopile arrays manufactured using integrated process compatible materials and micro-machining will provide high performance with low manufacturing cost. Black Forest Engineering (BFE) teamed with Case Western Reserve University will design thermopiles using silicon based semiconductors and compare performance. Low cost thermopiles, differentially coupled with advanced BFE CMOS readout, will provide DOD with rugged, inexpensive, and high performance infrared sensing capabilities. Si (poly and single crystal) and SiC (poly) thermopiles will be designed and performance compared on the Phase I effort for fabrication of linear arrays applicable for infrared chemical and biological sensing missions. On Phase II the thermopile detector linear array will be fabricated and integrated with a BFE readout ASIC. The Phase II sensor will meet future ARMY sensing needs such as Bio-Aerosol Threat Alert.

* information listed above is at the time of submission.

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