Heterogeneous VCSEL Array Integration with Silicon Substrate

Award Information
Agency: Department of Defense
Branch: Missile Defense Agency
Contract: N/A
Agency Tracking Number: 41187
Amount: $65,000.00
Phase: Phase I
Program: SBIR
Awards Year: 1998
Solicitation Year: N/A
Solicitation Topic Code: N/A
Solicitation Number: N/A
Small Business Information
5507 North Paseo Ventoso, Tucson, AZ, 85715
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Nina Nordman
 (520) 577-1147
Business Contact
Phone: () -
Research Institution
We propose to heterogeneously integrate a large array (64x64) of vertical-cavity surface-emitting lasers (VCSELs) with a silicon substrate. This work takes advantage of the recently developed applique technique that quasi-monolithically integrates VCSELs with foundry processed CMOS chips. This development work will concentrate on obtaining yields of 100% for VCSELs in the array while maintaining the compatibility of the applique process to the heterogeneous integration with CMOS drive circuitry.

* information listed above is at the time of submission.

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