Heterogeneous VCSEL Array Integration with Silicon Substrate
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AbstractWe propose to heterogeneously integrate a large array (64x64) of vertical-cavity surface-emitting lasers (VCSELs) with a silicon substrate. This work takes advantage of the recently developed applique technique that quasi-monolithically integrates VCSELs with foundry processed CMOS chips. This development work will concentrate on obtaining yields of 100% for VCSELs in the array while maintaining the compatibility of the applique process to the heterogeneous integration with CMOS drive circuitry.
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