A LASER SURFACE PROFILOMETER FOR STEEP ASPHERIC SURFACES

Award Information
Agency:
Department of Energy
Branch
n/a
Amount:
$496,452.00
Award Year:
1989
Program:
SBIR
Phase:
Phase II
Contract:
n/a
Award Id:
7719
Agency Tracking Number:
7719
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
West Peabody Office Park, 83 Pine Street, Peabody, MA, 01960
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
Dr C F Chen
() -
Business Contact:
DR JAMES R ENGEL
(617) 535-7670
Research Institute:
n/a
Abstract
THE DEVELOPMENT OF AN INTERFEROMETRIC SURFACE PROFILOMETER IS PLANNED. KEY PHASE I PERFORMANCE SPECIFICATIONS INCLUDE PRECISION AND RESOLUTION FOR STEEP ASPHERIC SURFACES OF 2.5NM IN SURFACE HEIGHT MEASUREMENT, A SPATIAL RESOLUTION OF 0.2MM, AND THE ABILITY TO HANDLE SURFACE SLOPES IN THE RANGE 25 DEGREES WITH A LINEAR TRADE-OFF BETWEEN THESE TWO PARAMETERS. DURING PHASEII IT IS ANTICIPATED THAT PERISCOPIC OPTICS WILL BE DEVELOPED (TO INSPECT THE INTERIOR OF CYLINDRICAL SURFACES) AND THAT IMPROVEMENTS IN SPATIAL RESOLUTION MAY BE ACHIEVED. THE PROPOSED INSTRUMENT IS BASED ON THE USE OF A TWO-FREQUENCY HENE LASER, AND IS AN EVOLUTION FROM A BREADBOARD INSTRUMENT THAT HAS EXHIBITED SUBNANOMETER HEIGHTRESOLUTION AND 2 MICRON SPATIAL RESOLUTION.

* information listed above is at the time of submission.

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