Monolithic Deformable Membrane Mirror for High Energy Laser Applications

Award Information
Agency: Department of Defense
Branch: Air Force
Contract: FA9451-04-C-0142
Agency Tracking Number: F031-3268
Amount: $749,920.00
Phase: Phase II
Program: SBIR
Awards Year: 2004
Solicitation Year: 2003
Solicitation Topic Code: AF03-001
Solicitation Number: 2003.1
Small Business Information
3 Preston Court, Bedford, MA, 01730
DUNS: 101184950
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: Y
Principal Investigator
 Jeremy Hui
 (781) 275-3100
Business Contact
 Cardinal Warde
Phone: (781) 275-3100
Research Institution
To address the high-speed, low-cost, low-weight, and compact requirements of space- and air-borne high-energy-laser adaptive optical systems, this Phase II program will design, test and fabricate a monolithic, high-energy, membrane-based deformable multi-layer-dielectric mirror using a rigid-plate electrostatic MEMS-actuator array. The actuators will be VLSI-chip driven, and in the program, a six-inch wafer will provide a 100 x 100 array of actuators on 1-mm centers. In particular, the Phase II will focus on the problems of electrostatic MEMS actuator design and fabrication, high-voltage VLSI-MEMS driver chip design and fabrication, prototype modulator assembly, and the high-speed electronic control of the device. The proposed modulator is designed to offer: large stroke (8 µm), low-voltage (~100 V) and low power operation, low weight, scalability to millions of actuators, fast rise time (10 microsecond), electrically-independent actuators, excellent surface figure with 8-bit grayscale phase resolution, high laser power damage threshold, compatibility with system architectures that reduce the computations necessary to compensate wavefront distortion, and low manufacturing cost. Our price/performance goal is 10K actuators with a 10 kHz frame rate for $10K.

* information listed above is at the time of submission.

Agency Micro-sites

US Flag An Official Website of the United States Government