Monolithic Deformable Membrane Mirror for High Energy Laser Applications

Award Information
Agency:
Department of Defense
Branch
Air Force
Amount:
$749,920.00
Award Year:
2004
Program:
SBIR
Phase:
Phase II
Contract:
FA9451-04-C-0142
Award Id:
62194
Agency Tracking Number:
F031-3268
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
3 Preston Court, Bedford, MA, 01730
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
101184950
Principal Investigator:
Jeremy Hui
(781) 275-3100
jhui@optronsystems.com
Business Contact:
Cardinal Warde
(781) 275-3100
warde@optronsystems.com
Research Institution:
n/a
Abstract
To address the high-speed, low-cost, low-weight, and compact requirements of space- and air-borne high-energy-laser adaptive optical systems, this Phase II program will design, test and fabricate a monolithic, high-energy, membrane-based deformable multi-layer-dielectric mirror using a rigid-plate electrostatic MEMS-actuator array. The actuators will be VLSI-chip driven, and in the program, a six-inch wafer will provide a 100 x 100 array of actuators on 1-mm centers. In particular, the Phase II will focus on the problems of electrostatic MEMS actuator design and fabrication, high-voltage VLSI-MEMS driver chip design and fabrication, prototype modulator assembly, and the high-speed electronic control of the device. The proposed modulator is designed to offer: large stroke (8 ¿m), low-voltage (~100 V) and low power operation, low weight, scalability to millions of actuators, fast rise time (10 microsecond), electrically-independent actuators, excellent surface figure with 8-bit grayscale phase resolution, high laser power damage threshold, compatibility with system architectures that reduce the computations necessary to compensate wavefront distortion, and low manufacturing cost. Our price/performance goal is 10K actuators with a 10 kHz frame rate for $10K.

* information listed above is at the time of submission.

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