Monolithic Deformable Membrane Mirror for High Energy Laser Applications

Award Information
Agency: Department of Defense
Branch: Air Force
Contract: FA9451-04-C-0142
Agency Tracking Number: F031-3268
Amount: $749,920.00
Phase: Phase II
Program: SBIR
Awards Year: 2004
Solicitation Year: 2003
Solicitation Topic Code: AF03-001
Solicitation Number: 2003.1
Small Business Information
3 Preston Court, Bedford, MA, 01730
DUNS: 101184950
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: Y
Principal Investigator
 Jeremy Hui
 (781) 275-3100
Business Contact
 Cardinal Warde
Phone: (781) 275-3100
Research Institution
To address the high-speed, low-cost, low-weight, and compact requirements of space- and air-borne high-energy-laser adaptive optical systems, this Phase II program will design, test and fabricate a monolithic, high-energy, membrane-based deformable multi-layer-dielectric mirror using a rigid-plate electrostatic MEMS-actuator array. The actuators will be VLSI-chip driven, and in the program, a six-inch wafer will provide a 100 x 100 array of actuators on 1-mm centers. In particular, the Phase II will focus on the problems of electrostatic MEMS actuator design and fabrication, high-voltage VLSI-MEMS driver chip design and fabrication, prototype modulator assembly, and the high-speed electronic control of the device. The proposed modulator is designed to offer: large stroke (8 µm), low-voltage (~100 V) and low power operation, low weight, scalability to millions of actuators, fast rise time (10 microsecond), electrically-independent actuators, excellent surface figure with 8-bit grayscale phase resolution, high laser power damage threshold, compatibility with system architectures that reduce the computations necessary to compensate wavefront distortion, and low manufacturing cost. Our price/performance goal is 10K actuators with a 10 kHz frame rate for $10K.

* information listed above is at the time of submission.

Agency Micro-sites

SBA logo
Department of Agriculture logo
Department of Commerce logo
Department of Defense logo
Department of Education logo
Department of Energy logo
Department of Health and Human Services logo
Department of Homeland Security logo
Department of Transportation logo
Environmental Protection Agency logo
National Aeronautics and Space Administration logo
National Science Foundation logo
US Flag An Official Website of the United States Government