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A MEMS-Based Sensor for Automation and Control of Fluid Valves

Award Information
Agency: Department of Defense
Branch: Navy
Contract: N65538-05-M-0012
Agency Tracking Number: N043-220-0308
Amount: $99,998.00
Phase: Phase I
Program: SBIR
Solicitation Topic Code: N04-220
Solicitation Number: 2004.3
Solicitation Year: 2004
Award Year: 2004
Award Start Date (Proposal Award Date): 2004-10-20
Award End Date (Contract End Date): 2006-02-17
Small Business Information
4415 Euclid Avenue, Suite 500
Cleveland, OH 44103
United States
DUNS: 557510336
HUBZone Owned: No
Woman Owned: No
Socially and Economically Disadvantaged: No
Principal Investigator
 Greg Shaw
 Director, Microdevices
 (216) 649-0399
Business Contact
 Joseph Snyder
Title: Vice President
Phone: (216) 649-0399
Research Institution

In this program, Orbital Research Inc. will enhance its current embedded pressure sensor technology, which previously has been demonstrated for sensing in-situ engine combustion events, for the automation and control of shipboard fluid valves. Precise control of high pressure fluidic systems is currently accomplished using high performance control valves. Performance of these valves can be improved by coupling them with local pressure sensors to allow feedback control. Adding data feedback to damage control, propulsion and other shipboard systems will enable improved safety, greater efficiency and better system survivability while requiring less manning. This proposal presents an innovative MEMS-based sensor system which exhibits very high sensitivity allowing it to be small and non-intrusive. Its material composition makes it very robust, chemically resistant, and survivable in a variety of environments, including salt water, lube oil, and hydraulic fluid. The MEMS fabrication technology makes it inherently inexpensive and allows flexibility in packaging to accommodate communication options. In this Phase I program, a sensor will be designed, and fabricated for laboratory testing to ensure robustness and prove the feasibility. The Phase II program will build on the Phase I through detailed design optimization including extensive full-scale prototype testing in a working fluid system. At the conclusion of this successful SBIR program, Orbital Research anticipates having a system ready for Phase III field evaluation on a future combatant platform such as DD(X).

* Information listed above is at the time of submission. *

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