A MEMS–Based Sensor for Automation and Control of Fluid Valves

Award Information
Agency: Department of Defense
Branch: Navy
Contract: N00024-06-C-4128
Agency Tracking Number: N043-220-0308
Amount: $400,000.00
Phase: Phase II
Program: SBIR
Awards Year: 2006
Solicitation Year: 2004
Solicitation Topic Code: N04-220
Solicitation Number: 2004.3
Small Business Information
4415 Euclid Avenue, Suite 500, Cleveland, OH, 44103
DUNS: 557510336
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Greg Shaw
 Director, Microdevices &
 (216) 649-0399
Business Contact
 Joseph Snyder II
Title: Vice President, Administr
Phone: (216) 649-0399
Email: snyder@orbitalresearch.com
Research Institution
Flow inventory for the Automated Fire Suppression System (AFSS) will enable early detection of leaks and damage and will enable distributed control schemes that are robust to localized damage. Very sensitive pressure sensors are required to implement such a system. The sensitivity must be complemented by extremely high over-pressure capability. This program continues the development of a MEMS-based sensor. This technology is an extension of the pressure sensor technology that has already been demonstrated for sensing combustion events in diesel and turbine engines. The sensor has very high sensitivity allowing for a smaller size, is very robust, and is mechanically and chemically robust. The MEMS fabrication technology makes it inherently inexpensive. In this Phase II program, the application specific sensor will be packaged, tested and optimized.

* Information listed above is at the time of submission. *

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