A MEMS-Based Sensor for Automation and Control of Fluid Valves

Award Information
Agency:
Department of Defense
Branch
Navy
Amount:
$400,000.00
Award Year:
2006
Program:
SBIR
Phase:
Phase II
Contract:
N00024-06-C-4128
Award Id:
70289
Agency Tracking Number:
N043-220-0308
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
4415 Euclid Avenue, Suite 500, Cleveland, OH, 44103
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
557510336
Principal Investigator:
Greg Shaw
Director, Microdevices &
(216) 649-0399
shaw@orbitalresearch.com
Business Contact:
Joseph Snyder II
Vice President, Administr
(216) 649-0399
snyder@orbitalresearch.com
Research Institution:
n/a
Abstract
Flow inventory for the Automated Fire Suppression System (AFSS) will enable early detection of leaks and damage and will enable distributed control schemes that are robust to localized damage. Very sensitive pressure sensors are required to implement such a system. The sensitivity must be complemented by extremely high over-pressure capability. This program continues the development of a MEMS-based sensor. This technology is an extension of the pressure sensor technology that has already been demonstrated for sensing combustion events in diesel and turbine engines. The sensor has very high sensitivity allowing for a smaller size, is very robust, and is mechanically and chemically robust. The MEMS fabrication technology makes it inherently inexpensive. In this Phase II program, the application specific sensor will be packaged, tested and optimized.

* information listed above is at the time of submission.

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