SBIR Phase I: Novel Ion Source for Enhanced Focused Ion Beam Material Removal at the Nano, Micro and Macro-Scales

Award Information
Agency: National Science Foundation
Branch: N/A
Contract: 0741150
Agency Tracking Number: 0741150
Amount: $99,999.00
Phase: Phase I
Program: SBIR
Awards Year: 2008
Solicitation Year: N/A
Solicitation Topic Code: AM
Solicitation Number: NSF 07-551
Small Business Information
2704 SE 39th Loop, Suite 109, Hillsboro, OR, 97123
DUNS: 800617420
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Noel Smith
 PhD
 (503) 928-0886
 n.smith@oregon-physics.com
Business Contact
 Noel Smith
Title: PhD
Phone: (503) 928-0886
Email: n.smith@oregon-physics.com
Research Institution
N/A
Abstract
This Small Business Innovation Research (SBIR) Phase I research project will investigate the feasibility of increasing the spectral brightness of a plasma ion source by miniaturizing the plasma size and improving the energy transfer to the source with a poly-phase RF antenna. This new ion source will extend the range of focused ion beam machining tools from the nano-scale where today?s focused ion beams (FIBs) are practically used, to the micro-scale and macro-scale. FIB tools are used for nanometer scale precision material removal. The benefits of FIB tools include nanoscale beam placement accuracy, a combined imaging and patterning system for accurate part registration and pattern placement, and low structural damage of the area surrounding the removed volume. The development of this new ion source would have a broad impact in enabling FIB systems to remove material at the nano, micro, and macro scales with material removal rates that are suitable to the different length scales. The broader impact/commercial potential from the technology will be a new ion source that would have a broad impact in enabling FIB systems to remove material at the nano, micro, and macro scales with material removal rates that are suitable to the different length scales. This technology would also have a broad impact in other areas that use ion sources such as secondary ion mass spectrometry (SIMS) instruments and ion accelerators for high energy physics. The new source could be used to improve SIMS imaging resolution to the theoretical limit of approximately 10 nano-meters.

* Information listed above is at the time of submission. *

Agency Micro-sites

SBA logo
Department of Agriculture logo
Department of Commerce logo
Department of Defense logo
Department of Education logo
Department of Energy logo
Department of Health and Human Services logo
Department of Homeland Security logo
Department of Transportation logo
Environmental Protection Agency logo
National Aeronautics and Space Administration logo
National Science Foundation logo
US Flag An Official Website of the United States Government