IMPROVED DRY ETCHING OF MCT USING THE PLASMA QUEST FREE RADICAL REACTOR

Award Information
Agency:
Department of Defense
Amount:
$50,000.00
Program:
SBIR
Contract:
N/A
Solitcitation Year:
N/A
Solicitation Number:
N/A
Branch:
Defense Advanced Research Projects Agency
Award Year:
1990
Phase:
Phase I
Agency Tracking Number:
12845
Solicitation Topic Code:
N/A
Small Business Information
Plasma Quest Inc
315 N Interurban - Ste 101, Richardson, TX, 75081
Hubzone Owned:
N
Woman Owned:
N
Socially and Economically Disadvantaged:
N
Duns:
N/A
Principal Investigator
 Dr John E Spencer
 (214) 680-1811
Business Contact
Phone: () -
Research Institution
N/A
Abstract
N/A

* information listed above is at the time of submission.

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