IMPROVED DRY ETCHING OF MCT USING THE PLASMA QUEST FREE RADICAL REACTOR

Award Information
Agency:
Department of Defense
Branch
Defense Advanced Research Projects Agency
Amount:
$50,000.00
Award Year:
1990
Program:
SBIR
Phase:
Phase I
Contract:
n/a
Agency Tracking Number:
12845
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
Plasma Quest Inc
315 N Interurban - Ste 101, Richardson, TX, 75081
Hubzone Owned:
N
Socially and Economically Disadvantaged:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
Dr John E Spencer
(214) 680-1811
Business Contact:
() -
Research Institution:
n/a
Abstract
N/A

* information listed above is at the time of submission.

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