COMPACT, QUASI-CW ARF LASERS FOR PHOTOLITHOGRAPHY

Award Information
Agency: Department of Defense
Branch: Defense Advanced Research Projects Agency
Contract: N/A
Agency Tracking Number: 17219
Amount: $49,626.00
Phase: Phase I
Program: SBIR
Awards Year: 1991
Solicitation Year: N/A
Solicitation Topic Code: N/A
Solicitation Number: N/A
Small Business Information
4720-e Boston Way, Lanham, MA, 02706
DUNS: N/A
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 () -
Business Contact
Phone: () -
Research Institution
N/A
Abstract
A SMALL HIGH-REPETITION-RATE ARF LASER UTILIZING MICROWAVE DISCHARGE EXCITATION WILL BE CONSTRUCTED FOR INTERFEROMETRY AND MASTER OSCILLATOR APPLICATIONS IN PHOTOLITHOGRAPHY. THE LASER WILL EXHIBIT A SPECTRAL WIDTH OF APPROXIMATELY 2 PICOMETERS AND IS EXPECTED TO OPERATE IN A LOW-ORDER TRANSVERSE MODE. IT SHOULD BE CAPABLE OF PULSE REPETITION RATES IN EXCESS OF ONE KILOHERTZ. THE PROPOSED LOW-ORDER TRANSVERSE MODE WOULD FIND APPLICATIONS IN INJECTION CONTROL OF LARGER ARF LASERS AND IN UV RAMAN SPECTROSCOPY. IN ADDITION, MANY APPLICATIONS EXIST IN MICROFABRICATION AND CHEMICAL ANALYSIS FOR A FAR ULTRAVIOLET SOURCE WHICH IS COMPACT, WITH REDUCED MAINTENANCE REQUIREMENTS.

* Information listed above is at the time of submission. *

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