COMPACT, QUASI-CW ARF LASERS FOR PHOTOLITHOGRAPHY

Award Information
Agency:
Department of Defense
Branch
Defense Advanced Research Projects Agency
Amount:
$49,626.00
Award Year:
1991
Program:
SBIR
Phase:
Phase I
Contract:
n/a
Award Id:
17219
Agency Tracking Number:
17219
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
4720-e Boston Way, Lanham, MA, 02706
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
() -
Business Contact:
() -
Research Institution:
n/a
Abstract
A SMALL HIGH-REPETITION-RATE ARF LASER UTILIZING MICROWAVE DISCHARGE EXCITATION WILL BE CONSTRUCTED FOR INTERFEROMETRY AND MASTER OSCILLATOR APPLICATIONS IN PHOTOLITHOGRAPHY. THE LASER WILL EXHIBIT A SPECTRAL WIDTH OF APPROXIMATELY 2 PICOMETERS AND IS EXPECTED TO OPERATE IN A LOW-ORDER TRANSVERSE MODE. IT SHOULD BE CAPABLE OF PULSE REPETITION RATES IN EXCESS OF ONE KILOHERTZ. THE PROPOSED LOW-ORDER TRANSVERSE MODE WOULD FIND APPLICATIONS IN INJECTION CONTROL OF LARGER ARF LASERS AND IN UV RAMAN SPECTROSCOPY. IN ADDITION, MANY APPLICATIONS EXIST IN MICROFABRICATION AND CHEMICAL ANALYSIS FOR A FAR ULTRAVIOLET SOURCE WHICH IS COMPACT, WITH REDUCED MAINTENANCE REQUIREMENTS.

* information listed above is at the time of submission.

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