NANOMETER LITHOGRAPHY USING SCANNING TUNNELING MICROSCOPY

Award Information
Agency:
Department of Defense
Branch
Army
Amount:
$500,000.00
Award Year:
1989
Program:
SBIR
Phase:
Phase II
Contract:
n/a
Award Id:
9019
Agency Tracking Number:
9019
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
959 E Walnut St #110, Pasadena, CA, 91106
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
Dr Paul E West
(818) 795-1163
Business Contact:
() -
Research Institute:
n/a
Abstract
THE ARMY SEEKS APPLICATIONS OF SCANNING TUNNELING MICROSCOPY TO PERFORM LITHOGRAPHY ON MICROELECTRONICS DEVICES. THE EMERGING TECHNOLOGY OF SCANNING TUNNELING MICROSCOPY (STM) IS CAPABLE OF IMAGING SURFACES TO ATOMIC RESOLUTION. QUAN-SCAN PROPOSES TO STUDY THE FEASIBILITY OF APPLYING STM TECHNOLOGY TO ACHIEVE NANOMETER SURFACE ITHOGRAPHY AND DETERMINE WHETHER THE TECHNIQUES CAN PROVE USEFUL FOR FABRICATION OR REPAIR OF 100-ANGSTROM SIZED STRUCTURES. THE EFFORT WILL INVOLVE INVESTIGATING ALTERNATIVE CHEMICAL SYSTEMS FOR DOING LITHOGRAPHIC PROCESSES, DETERMINING THE INSTRUMENTATION REQUIREMENTS FOR DOING LITHOGRAPHY, AND EXAMINING POTENTIAL APPLICATIONS OF THE TECHNIQUES TO MICROELECTRONICS DEVICES.

* information listed above is at the time of submission.

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