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Imaging Variable Kinetic Energy Electron Analyzer

Award Information
Agency: Department of Commerce
Branch: National Institute of Standards and Technology
Contract: SB1341-06-W-0731
Agency Tracking Number: 501-44
Amount: $74,909.00
Phase: Phase I
Program: SBIR
Solicitation Topic Code: N/A
Solicitation Number: N/A
Solicitation Year: N/A
Award Year: 2006
Award Start Date (Proposal Award Date): N/A
Award End Date (Contract End Date): N/A
Small Business Information
522 Chestnut St. #1, San Carlos, CA, 94070
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Raymond Browning
 () -
Business Contact
 Raymond Browning
Phone: (650) 595-1528
Research Institution
The objective of this proposal is to create a prototype imaging variable kinetic energy electron analyzer in the range 0.1 to 8 keV for use with an X-ray excitation source. The imaging analyzer is to have a target imaging spatial resolution of 100 nm. The X-ray excitation source will be a synchrotron light source. The instrument can be described as an X-ray photoelectron spectroscopy (XPS) microscope XPM. The microscope will use a magnetic immersion projection lens and an electrostatic hemispherical electron analyzer. COMMERCIAL APPLICATIONS: XPS microanalysis could prove to be a significant analysis tool in the investigation of techniques for sub-micron semiconductor device physics, materials science, and nanoscale devices. Current XPS imaging systems are bulky and expensive. The tool proposed here could have widespread acceptance as a routing tool for microanalysis.

* Information listed above is at the time of submission. *

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