An inexpensive, versatile micro-machined mass spectrometer

Award Information
Agency: National Aeronautics and Space Administration
Branch: N/A
Contract: N/A
Agency Tracking Number: NASA1067
Amount: $69,968.00
Phase: Phase I
Program: SBIR
Awards Year: 2001
Solicitation Year: N/A
Solicitation Topic Code: N/A
Solicitation Number: N/A
Small Business Information
4325B Forbes Blvd, Lanham, MD, 20706
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Jon Fox
 Principal Scientist
 (609) 258-1022
Business Contact
 Michael Corson
Title: Vice President
Phone: (301) 306-0010
Research Institution
The inexpensive, versatile micro-machined mass spectrometer (IVM^{2}-MS) is envisioned as a inexpensive replacement for large, complex, macroscopic instruments in use in the field and in the laboratory. At its core it is a 180 degree magnetic deflection mass filter fabricated from Si wafers. A small vacuum chamber for mass separation with an entrance slit and exit slit are micro-machined from the wafer by anistropic etching. An acceleration grid is built over the entrance slit and a small faraday cup built around the exit slit using standard lithographic methods. On the largest dimension they are on the order of 1.5 millimeters, with different accelerator to collector distances useful for changing the m/Z tuning characteristics of the filter. Arrays of such small mass filters can be created on a single wafer, and multichannel detection becomes trivial. Funding is requested to fabricate such a device and perform an elementary proof-of-concept study.

* Information listed above is at the time of submission. *

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