A Micro-Electroformed Cross Capacitor (MECC)

Award Information
Agency:
Department of Commerce
Branch
n/a
Amount:
$74,852.00
Award Year:
2002
Program:
SBIR
Phase:
Phase I
Contract:
SB1341-02-W-1077
Agency Tracking Number:
7.10.02
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
Research Support Instruments, Inc.
4325B Forbes Blvd., Lanham, MD, 20706
Hubzone Owned:
N
Socially and Economically Disadvantaged:
N
Woman Owned:
N
Duns:
082602590
Principal Investigator:
Jon Fox
Principal Scientist
(609) 580-0080
fox@researchsupport.com
Business Contact:
George Caledonia
President/CEO
() -
caledonia@psicorp.com
Research Institution:
n/a
Abstract
Utilizing new hard, etch resistant photoresists derived from epoxy formulations such as SU-8 to serve as the mold for electroless metaldeposition for MEMS electroforming techniques, a fully micro-miniaturized cross capacitor can be realized. A Micro-Electroformed Cross Capacitor (MECC) is built by electroforming high aspect metals atop the substrate. A Phase 1 effort would model MECC performance, develop the process steps for fabrication, and finally demonstrate the ability to fabricate a micro-miniaturized cross capacitor.

* information listed above is at the time of submission.

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