A Micro-Electroformed Cross Capacitor (MECC)
Small Business Information
Research Support Instruments, Inc.
4325B Forbes Blvd., Lanham, MD, 20706
AbstractUtilizing new hard, etch resistant photoresists derived from epoxy formulations such as SU-8 to serve as the mold for electroless metaldeposition for MEMS electroforming techniques, a fully micro-miniaturized cross capacitor can be realized. A Micro-Electroformed Cross Capacitor (MECC) is built by electroforming high aspect metals atop the substrate. A Phase 1 effort would model MECC performance, develop the process steps for fabrication, and finally demonstrate the ability to fabricate a micro-miniaturized cross capacitor.
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