A Microformed Magnet-Based Microphone/Speaker Array for Active Noise Reduction

Award Information
Agency:
Department of Defense
Branch
Air Force
Amount:
$99,956.00
Award Year:
2005
Program:
SBIR
Phase:
Phase I
Contract:
FA8650-05-M-6574
Agency Tracking Number:
F051-059-2851
Solicitation Year:
2005
Solicitation Topic Code:
AF05-059
Solicitation Number:
2005.1
Small Business Information
RESEARCH SUPPORT INSTRUMENTS
20 New England Business Center, Andover, MA, 01810
Hubzone Owned:
N
Socially and Economically Disadvantaged:
N
Woman Owned:
N
Duns:
076337877
Principal Investigator:
John F Kline
Principal Research Scientist
(732) 329-3700
kline@researchsupport.com
Business Contact:
Christopher Rollins
Vice President
(301) 306-0010
rollins@researchsupport.com
Research Institution:
n/a
Abstract
Research Support Instruments, Inc. (RSI) proposes to develop a MEMS microspeaker/ microphone array for use in active noise reduction (ANR). Micromachined pressure transducers using piezoresistive or capacitive sensing techniques are well developed; this project will instead develop a magnetic microphone. Magnet-based microphones in macroscale technologies have advantages in sensitivity, bandwidth, and ruggedness; similar advantages can be expected on the microscale. The same technology will be used to develop a microspeaker. RSI has an innovative technology to develop micromagnets; using micromagnets in both the microphones and the speakers will ease integration of the two circuits, and take advantage of both technologies. The Phase I program will involve design, fabrication, and test of magnet-based MEMS microphones and speakers to determine their sensitivity, speaker amplitude, ruggedness, and bandwidth. RSI will use its experience in silicon nitride membranes, micromagnets, and pressure sensors to employ a highly innovative microfabricated technology - the magnetic MEMS speaker/microphone array - in order to develop speakers and microphones with a combination of sensitivity and speaker amplitude previously unattained by MEMS-sized devices.

* information listed above is at the time of submission.

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