A Microformed Magnet-Based Microphone/Speaker Array for Active Noise Reduction

Award Information
Agency: Department of Defense
Branch: Air Force
Contract: FA8650-05-M-6574
Agency Tracking Number: F051-059-2851
Amount: $99,956.00
Phase: Phase I
Program: SBIR
Awards Year: 2005
Solicitation Year: 2005
Solicitation Topic Code: AF05-059
Solicitation Number: 2005.1
Small Business Information
20 New England Business Center, Andover, MA, 01810
DUNS: 076337877
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 John F Kline
 Principal Research Scientist
 (732) 329-3700
Business Contact
 Christopher Rollins
Title: Vice President
Phone: (301) 306-0010
Email: rollins@researchsupport.com
Research Institution
Research Support Instruments, Inc. (RSI) proposes to develop a MEMS microspeaker/ microphone array for use in active noise reduction (ANR). Micromachined pressure transducers using piezoresistive or capacitive sensing techniques are well developed; this project will instead develop a magnetic microphone. Magnet-based microphones in macroscale technologies have advantages in sensitivity, bandwidth, and ruggedness; similar advantages can be expected on the microscale. The same technology will be used to develop a microspeaker. RSI has an innovative technology to develop micromagnets; using micromagnets in both the microphones and the speakers will ease integration of the two circuits, and take advantage of both technologies. The Phase I program will involve design, fabrication, and test of magnet-based MEMS microphones and speakers to determine their sensitivity, speaker amplitude, ruggedness, and bandwidth. RSI will use its experience in silicon nitride membranes, micromagnets, and pressure sensors to employ a highly innovative microfabricated technology - the magnetic MEMS speaker/microphone array - in order to develop speakers and microphones with a combination of sensitivity and speaker amplitude previously unattained by MEMS-sized devices.

* Information listed above is at the time of submission. *

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