High-Resolution, Low-Taper Excimer-Laser Machining of Thick Materials

Award Information
Agency:
National Aeronautics and Space Administration
Branch
n/a
Amount:
$70,000.00
Award Year:
1994
Program:
SBIR
Phase:
Phase I
Contract:
n/a
Award Id:
22627
Agency Tracking Number:
22627
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
4 Bud Way, Building 21, Nashua, NH, 03063
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
Ronald D. Schaeffer
(603) 886-6772
Business Contact:
() -
Research Institute:
n/a
Abstract
Excimer lasers have been used commercially in manufacturing environments for only about four years. Their utility lies in the short wavelength and high resolution of the output, making it possible to realize both high resolution features and high aspect ratios, with very precise control over the machining process. An optimization of process parameters is needed, however, before many potential commercial applications can be realized. The goal of this program is to completely investigate all of the necessary parameters affecting the ability to use the excimer laser to develop high aspect ratio, low taper angle, high resolution features in metals as applied to NASA's current need for high energy radiation collimators. Also, we will deliver representative samples to prove the concept, necessary for Phase II continuation, under which we will fabricate the end product based on Phase I studies. It is anticipated that this study will have great benefit for commercialization of other materials processing applications.

* information listed above is at the time of submission.

Agency Micro-sites


SBA logo

Department of Agriculture logo

Department of Commerce logo

Department of Defense logo

Department of Education logo

Department of Energy logo

Department of Health and Human Services logo

Department of Homeland Security logo

Department of Transportation logo

Enviromental Protection Agency logo

National Aeronautics and Space Administration logo

National Science Foundation logo
US Flag An Official Website of the United States Government