SBIR Phase I: Acoustic Microcavitation Assisted Fine Cleaning of Post-Chemical Mechanical Plana

Award Information
Agency:
National Science Foundation
Branch:
N/A
Amount:
$100,000.00
Award Year:
1998
Program:
SBIR
Phase:
Phase I
Contract:
N/A
Agency Tracking Number:
43497
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
RITEC Inc
60 Alhambra Road, Suite 5, Warwick, RI, 02886
Hubzone Owned:
N
Socially and Economically Disadvantaged:
N
Woman Owned:
N
Duns:
N/A
Principal Investigator
 Mark Mckenna
 (401) 738-3660
Business Contact
Phone: (401) 738-3660
Research Institution
N/A
Abstract
N/A

* information listed above is at the time of submission.

Agency Micro-sites

US Flag An Official Website of the United States Government