SBIR Phase I: Acoustic Microcavitation Assisted Fine Cleaning of Post-Chemical Mechanical Plana

Award Information
Agency:
National Science Foundation
Branch
n/a
Amount:
$100,000.00
Award Year:
1998
Program:
SBIR
Phase:
Phase I
Contract:
n/a
Agency Tracking Number:
43497
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
RITEC Inc
60 Alhambra Road, Suite 5, Warwick, RI, 02886
Hubzone Owned:
N
Socially and Economically Disadvantaged:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
Mark Mckenna
(401) 738-3660
Business Contact:
(401) 738-3660
Research Institution:
n/a
Abstract
N/A

* information listed above is at the time of submission.

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