OPTICAL CHARACTERIZATION TECHNIQUES FOR SOI MATERIAL

Award Information
Agency: National Science Foundation
Branch: N/A
Contract: N/A
Agency Tracking Number: 5248
Amount: $210,555.00
Phase: Phase II
Program: SBIR
Awards Year: 1989
Solicitation Year: N/A
Solicitation Topic Code: N/A
Solicitation Number: N/A
Small Business Information
13423 Desert Hills N.e., Alguquerque, NM, 87111
DUNS: N/A
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 () -
Business Contact
 RODNEY JACOBSON
Title: SENIOR RESEARCH ENGINEER
Phone: () -
Research Institution
N/A
Abstract
PRESENT TECHNIQUES OF EXAMING RECRYSTALLIZED SILICON, INCLUDING SOI MATERIAL, INCLUDE A WET (ACID) ETCH AND EXAMINATION WITH AN OPTICAL MICROSCOPE, X-RAY DIFFRACTION, SEM OR TEM MICROSCOPES. THESE TECHNIQUES ARE SLOW, AND USUALLY THE SAMPLE IS DESTROYED. SANDIA SYSTEMS PROPOSES INVESTIGATING ANGLE-RESOLVED LIGHT SCATTER TECHNIQUES AS A METHOD TO EXAMINE RECRYSTALLIZED SILICON AS WELL AS OTHER MICROELECTRONICS MATERIALS. THE TECHNIQUE WOULD BE NONPERTURBING, COULD BE APPLIED IN SITU, WOULD BE FAST, AND COULD BE ADAPTED FOR AUTOMATION.

* Information listed above is at the time of submission. *

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