OPTICAL CHARACTERIZATION TECHNIQUES FOR SOI MATERIAL

Award Information
Agency:
National Science Foundation
Branch
n/a
Amount:
$210,555.00
Award Year:
1989
Program:
SBIR
Phase:
Phase II
Contract:
n/a
Agency Tracking Number:
5248
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
Sandia Systems
13423 Desert Hills N.e., Alguquerque, NM, 87111
Hubzone Owned:
N
Socially and Economically Disadvantaged:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
() -
Business Contact:
RODNEY JACOBSON
SENIOR RESEARCH ENGINEER
() -
Research Institution:
n/a
Abstract
PRESENT TECHNIQUES OF EXAMING RECRYSTALLIZED SILICON, INCLUDING SOI MATERIAL, INCLUDE A WET (ACID) ETCH AND EXAMINATION WITH AN OPTICAL MICROSCOPE, X-RAY DIFFRACTION, SEM OR TEM MICROSCOPES. THESE TECHNIQUES ARE SLOW, AND USUALLY THE SAMPLE IS DESTROYED. SANDIA SYSTEMS PROPOSES INVESTIGATING ANGLE-RESOLVED LIGHT SCATTER TECHNIQUES AS A METHOD TO EXAMINE RECRYSTALLIZED SILICON AS WELL AS OTHER MICROELECTRONICS MATERIALS. THE TECHNIQUE WOULD BE NONPERTURBING, COULD BE APPLIED IN SITU, WOULD BE FAST, AND COULD BE ADAPTED FOR AUTOMATION.

* information listed above is at the time of submission.

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