Automated Defect Analysis Using a Doma Scatterometer and Image Analysis

Award Information
Agency:
Department of Defense
Branch
Air Force
Amount:
$63,881.00
Award Year:
1993
Program:
SBIR
Phase:
Phase I
Contract:
n/a
Agency Tracking Number:
20151
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
Sandia Systems, Inc.
2655a Pan American Freeway Ne, Albuquerque, NM, 87107
Hubzone Owned:
N
Socially and Economically Disadvantaged:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
Richard Krukar
(505) 343-8112
Business Contact:
() -
Research Institution:
n/a
Abstract
We will model the optical scatter produced by different shapes and concentrations of defects using scalar diffraction theory. We will develop image processing techniques which can be used to supply features to analysis routines using the model data and determine the ability of the technique to predict the shape and concentration of defects. We will assemble a dome scatterometer, examine samples of material which have defects similar in shape and density as those which have been modeled, and determine the ability of the image processing techniques to predict defect properties using real samples. Based on the level of success achieved, we will determine modifications necessary for the image processing and analysis techniques and for the dome scatterometer. These changes and an improved dome scatterometer will be implemented in a Phase I effort.

* information listed above is at the time of submission.

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