X-Y Translation Using Terfenol-D and a High Resolution Capacitive Sensor

Award Information
Agency: Department of Defense
Branch: Navy
Contract: N/A
Agency Tracking Number: 26491
Amount: $58,594.00
Phase: Phase I
Program: SBIR
Awards Year: 1994
Solicitation Year: N/A
Solicitation Topic Code: N/A
Solicitation Number: N/A
Small Business Information
12 Emily Street, Cambridge, MA, 02139
DUNS: N/A
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Dr. Vijay Gondhalekar
 (617) 661-0540
Business Contact
Phone: () -
Research Institution
N/A
Abstract
A fast, high accuracy X-Y translation table has been identified as desirable for nano lithography instruments. Over a wafer size of 3"x3", the translation table has to localize to a 20x20 um zone, and within this zone have a positioning accuracy better than 10 nanometers with a sweep speed of 20 um/sec. It is perceived as a two-step positioning problem, slow long range, fast and accurate shorter range servo. Phase I concentrates on designing a fast 2 nanometer resolution X-Y positioning mechanism for the 20x20 um zone. This mechanism will be incorporated into a slower 3"x3" X-Y translational table at a later stage. The key to fast, accurate positioning is a fast actuator and a sensor with high handwidth, accuracy and signal/noise ration. A Terfenol-D based translational actuator together with a 915 MHz capacitive sensor fulfill these requirements adequately. The proposal outlines a Phase I program to design a X-Y translation mechanism and to provide experimental proof of concept by demonstrating a one-degree-of-freedom servo system. Phase I will pave the way for full development of a prototype instrument in a Phase II program and commercialization in Phase III.

* Information listed above is at the time of submission. *

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