N/A

Award Information
Agency:
National Science Foundation
Amount:
$0.00
Program:
SBIR
Contract:
0078419
Solitcitation Year:
N/A
Solicitation Number:
N/A
Branch:
N/A
Award Year:
2001
Phase:
Phase I
Agency Tracking Number:
0078419
Solicitation Topic Code:
N/A
Small Business Information
SatCon Technology Corporation
161 First Street, Cambridge, MA, 02142
Hubzone Owned:
N
Woman Owned:
N
Socially and Economically Disadvantaged:
N
Duns:
N/A
Principal Investigator
 Won-jong Kim
 (979) 845-3645
 wjkim@mengr.tamu.edu
Business Contact
 Paul Heintel
Title: Contracts Manager
Phone: (617) 349-0867
Email: heintel@satc.com
Research Institution
N/A
Abstract
This Small Business Innovation Research (SBIR) Phase II project will develop a planar magnetic levitator/positioner for precision microelectronics manufacturing equipment. Based on feasibility proven in Phase I, Phase II will design, construct, and test a minimum-actuator maglev stage that can be readily integrated in a process tool. A single-moving maglev platen will be driven in all six degrees of freedom with three levitation motors. The platen will generate large two-dimensional motions for transportation with small four-axis motions for alignment and small adjustments. It will lead to a clean-room compatible, lightweight, compact, inexpensive structure that can meet demanding dynamic performance requirements in next-generation precision microelectronics manufacturing. Magnetic levitation has many potential applications in microelectronics manufacturing equipment that require precise planar position control, such as wafer steppers, wafer handlers, wire bonders, surface profilometers, scanned probe microscopes, and precision inspection machines. This technology is expected to figure prominently in the highly competitive microelectronics manufacturing capital equipment industry.

* information listed above is at the time of submission.

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