N/A

Award Information
Agency:
National Science Foundation
Branch
n/a
Amount:
$0.00
Award Year:
2001
Program:
SBIR
Phase:
Phase I
Contract:
0078419
Award Id:
55362
Agency Tracking Number:
0078419
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
161 First Street, Cambridge, MA, 02142
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
Won-jongKim
(979) 845-3645
wjkim@mengr.tamu.edu
Business Contact:
PaulHeintel
Contracts Manager
(617) 349-0867
heintel@satc.com
Research Institute:
n/a
Abstract
This Small Business Innovation Research (SBIR) Phase II project will develop a planar magnetic levitator/positioner for precision microelectronics manufacturing equipment. Based on feasibility proven in Phase I, Phase II will design, construct, and test a minimum-actuator maglev stage that can be readily integrated in a process tool. A single-moving maglev platen will be driven in all six degrees of freedom with three levitation motors. The platen will generate large two-dimensional motions for transportation with small four-axis motions for alignment and small adjustments. It will lead to a clean-room compatible, lightweight, compact, inexpensive structure that can meet demanding dynamic performance requirements in next-generation precision microelectronics manufacturing. Magnetic levitation has many potential applications in microelectronics manufacturing equipment that require precise planar position control, such as wafer steppers, wafer handlers, wire bonders, surface profilometers, scanned probe microscopes, and precision inspection machines. This technology is expected to figure prominently in the highly competitive microelectronics manufacturing capital equipment industry.

* information listed above is at the time of submission.

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