All-Solid-State Drivers for High Power Excimer Lasers Used in Projection Gas Immersion Laser Doping

Award Information
Agency: Department of Defense
Branch: Defense Advanced Research Projects Agency
Contract: N/A
Agency Tracking Number: 31812
Amount: $374,902.00
Phase: Phase II
Program: SBIR
Awards Year: 1997
Solicitation Year: N/A
Solicitation Topic Code: N/A
Solicitation Number: N/A
Small Business Information
15 Ward Street, Somerville, MA, 02143
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Daniel Birx
 (617) 547-1122
Business Contact
Phone: () -
Research Institution
The objective of this SBIR program is to develp all-solid-state pulsed modulators to drive the high power excimer (XeCl or XeF) lasers required to commercialize the Projcetion Gas Immersion Laser Doping (P-GILD) process. P-GILD uses a pulsed, 200-watt-class excimer laser as an illumination source to produce ultra-shallow, low-sheet resistance, box-like and retrograde impurity profiles in silicon without the use of high temperature anneals or conventional ion implantation. P-GILD thus meets all of the criteria for fabricating optimized deep-submicron devices. The P-GILD process requires a factor-of-20 scale up in average power from the production-worthy excimer laser technology now developed for 0.25 micron DUV lithography. It was only through the use of all-solid-state pulsed drivers that the 10 watt KrF lasers recently developed for DUV lithography were able to achieve the component lifetimes and cost of ownership required to make these lasers economically viable. In Phase I, SRL will work closely with Cymer Laser Technologies, the leading supplier of excimer lasers for DUV lithography worldwide, and Ultratech Stepper, the developer of the P-GILD process, to develop a detailed engineering design of an all-solid-state driver for a 200-watt excimer laser designed to meet P-GILD process requirements. In the Phase II effort, SRL will develop and deliver this prototype excimer laser driver to Cymer for integration on a high power excimer laser head and for extensive test and evaluation.

* Information listed above is at the time of submission. *

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