HIGH PULSE RATE EUV RADIATION SOURCE FOR SUB-0.1-MICRON-DESIGN-RULE LITHOGRAPHY

Award Information
Agency:
Department of Defense
Branch
Missile Defense Agency
Amount:
$64,916.00
Award Year:
1999
Program:
SBIR
Phase:
Phase I
Contract:
99-243
Agency Tracking Number:
99-243
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
SCIENCE RESEARCH LABORATORY, INC.
15 Ward Street, Somerville, MA, 02143
Hubzone Owned:
N
Socially and Economically Disadvantaged:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
DANIEL BIRX
(617) 547-1122
Business Contact:
() -
Research Institution:
n/a
Abstract
N/A

* information listed above is at the time of submission.

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