HIGH PULSE RATE EUV RADIATION SOURCE FOR SUB-0.1-MICRON-DESIGN-RULE LITHOGRAPHY

Award Information
Agency:
Department of Defense
Branch
Missile Defense Agency
Amount:
$1,497,271.00
Award Year:
2000
Program:
SBIR
Phase:
Phase II
Contract:
DTRA01-00-C-0086
Agency Tracking Number:
99-243
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
SCIENCE RESEARCH LAB., INC.
15 Ward ST, Somerville, MA, 02143
Hubzone Owned:
N
Socially and Economically Disadvantaged:
N
Woman Owned:
N
Duns:
106771140
Principal Investigator:
Daniel Birx
(617) 547-1122
Business Contact:
() -
Research Institution:
n/a
Abstract
N/A

* information listed above is at the time of submission.

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