PROCESS MODELING OF MAGNETRON REACTIVE ION ETCHING (MIE) - APPLICATIONS TO GAAS AND ALGAAS

Award Information
Agency:
Department of Defense
Branch
Army
Amount:
$499,000.00
Award Year:
1988
Program:
SBIR
Phase:
Phase II
Contract:
n/a
Award Id:
6389
Agency Tracking Number:
6389
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
Po Box 1058 - 50 Nye Rd, Glastonbury, CT, 06033
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
M Meyyappan
(203) 659-0333
Business Contact:
() -
Research Institute:
n/a
Abstract
THIS DOCUMENT DISCUSSES A PROPOSAL TO PERFORM PROCESS MODELING, VIA NUMERICAL SIMULATION, OF MAGNETRON REACTIVE ION ETCHING (MIE) PROCESS WITH APPLICATIONS TO ETCHING OF GAAS, ALGAAS AND OTHER III-IV COMPOUNDS. THE KEY ISSUES ARE UNDERSTANDING OF FLOW DYNAMICS, EFFECTS OF MAGNETIC FIELD ON FLOW DYNAMICS, AND PLASMA KINETICS. MIE PROCESS HAS A LARGE NUMBER OF PARAMETERS. IT IS NOT WELL KNOWN PRESENT HOW VARIOUS SYSTEM PARAMETERS SUCH AS PRESSURE, RF POWER, MAGNETIC FIELD STRENGTH, FLOW RATE, SYSTEM GEOMETRY, TEMPERATURE AND TYPE OF PLASMA AFFECT ETCH RATE, SELECTIVITY AND VOLTAGE REQUIREMENTS. MIE PROCESS ALSO IS DIFFICULT TO SCALE UP DUE TO COMPLEXITY OF PHYSICAL AND CHEMICAL PROCESSES INVOLVED. THIS PROPOSAL ADDRESSES THE ABOVE ISSUES, THROUGH NUMERICAL SOLUTIONS TO THE GOVERNING NONISOTHERMAL NAVIER-STOKES AND SPECIES CONTINUITY EQUATIONS. SURFACE REACTION KINETICS FOR THE ETCHING OG GAAS IS INCLUDED.

* information listed above is at the time of submission.

Agency Micro-sites


SBA logo

Department of Agriculture logo

Department of Commerce logo

Department of Defense logo

Department of Education logo

Department of Energy logo

Department of Health and Human Services logo

Department of Homeland Security logo

Department of Transportation logo

Enviromental Protection Agency logo

National Aeronautics and Space Administration logo

National Science Foundation logo
US Flag An Official Website of the United States Government