A NON-INVASIVE SENSOR TECHNIQUE FOR PROCESS CONTROL IN PLASMA PROCESSING REACTORS

Award Information
Agency: National Science Foundation
Branch: N/A
Contract: N/A
Agency Tracking Number: 17413
Amount: $49,897.00
Phase: Phase I
Program: SBIR
Awards Year: 1992
Solicitation Year: N/A
Solicitation Topic Code: N/A
Solicitation Number: N/A
Small Business Information
Po Box 1058, Glastonbury, CT, 06033
DUNS: N/A
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 M. Meyyappan
 Senior Research Scientist
 (203) 659-0333
Business Contact
Phone: () -
Research Institution
N/A
Abstract
THIS PROPOSAL ADDRESSES A PROGRAM TO DEVELOP A NONINVASIVE, IN-SITU SENSOR TECHNIQUE FOR APPLICATION IN SEMICONDUCTOR MANUFACTURING. THE PROPOSED SENSOR IS APPROPRIATE FOR DRY PLASMA PROCESSES SUCH AS DEPOSITION AND ETCHING WHICH ARE KEY STEPS IN SEMICONDUCTOR FABRICATION LINE. THE PROPOSED TECHNIQUE CAN PERFORM QUANTITATIVE MEASUREMENT OF CONSTITUENT SPECIES, DETECTION OF APPEARANCE/DISAPPEARANCE OF SPECIES AND CONTAMINANTS, AND END POINT DETECTION. THE ULTIMATE OBJECTIVE OF THIS MULTI-PHASE EFFORT IS TO PROVIDE A RELIABLE PROCESS CONTROL METHOD WITH THE PROPOSED SENSOR AS THE NUCLEUS OF THE PROCESS CONTROL LOOP. THE PROPOSED TECHNIQUE USES LASER INDUCED FLUORESCENCE (LIF)WITH AN INNOVATION TO PERFORM RAPID TEMPORAL AND SPATIAL SCANNING AND HIGH DEGREE OF ACCURACY AND SENSITIVITY. THE INNOVATION INVOLVES USE OF AN ACOUSTO-OPTICAL TUNABLE FILTER DEVELOPED AT SCIENTIFIC RESEARCH ASSOCIATES TO OBTAINHIGH SPECTRAL RESOLUTION WHILE MAINTAINING GOOD SPATIAL RESOLUTION, HIGH SENSITIVITY AND HIGH OPTICAL THROUGHPUT. IN PHASE I THE TECHNIQUE WILL BE DEMONSTRATED IN A CF4 PLASMA WHICH IS WIDELY USED IN SILICON ETCHING.

* Information listed above is at the time of submission. *

Agency Micro-sites

SBA logo
Department of Agriculture logo
Department of Commerce logo
Department of Defense logo
Department of Education logo
Department of Energy logo
Department of Health and Human Services logo
Department of Homeland Security logo
Department of Transportation logo
Environmental Protection Agency logo
National Aeronautics and Space Administration logo
National Science Foundation logo
US Flag An Official Website of the United States Government