A PROCESS MODEL AND COMPLEMENTARY EXPERIMENTS FOR THE ELETRON CYCLOTRON RESONANCE (ECR) TECHNOLOGY: APPLICATION TO DEPOSITION AND ETCHING

Award Information
Agency:
Department of Defense
Branch
Army
Amount:
$48,612.00
Award Year:
1992
Program:
SBIR
Phase:
Phase I
Contract:
n/a
Agency Tracking Number:
18545
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
Scientific Research Associates
P.o. Box 1058, 50 Nye Road, Glastonbury, CT, 06033
Hubzone Owned:
N
Socially and Economically Disadvantaged:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
M. Meyyappan
(230) 659-0333
Business Contact:
() -
Research Institution:
n/a
Abstract
N/A

* information listed above is at the time of submission.

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