PROCESS MODELING OF MAGNETRON REACTIVE ION ETCHING (MIE) - APPLICATIONS TO GAAS AND ALGAAS

Award Information
Agency:
Department of Defense
Branch:
Army
Amount:
$59,537.00
Award Year:
1987
Program:
SBIR
Phase:
Phase I
Contract:
N/A
Agency Tracking Number:
6389
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Scientific Research Associates
Po Box 1058 - 50 Nye Rd, Glastonbury, CT, 06033
Hubzone Owned:
N
Socially and Economically Disadvantaged:
N
Woman Owned:
N
Duns:
N/A
Principal Investigator
 M Meyyappan
 (203) 659-0333
Business Contact
Phone: () -
Research Institution
N/A
Abstract
N/A

* information listed above is at the time of submission.

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