ADAPTIVE CONTROL AND HIERARCHICAL SYSTEMS FOR A COMPLES MANUFACTURING ENVIRONMENT

Award Information
Agency:
Department of Defense
Branch
Defense Advanced Research Projects Agency
Amount:
$50,000.00
Award Year:
1990
Program:
SBIR
Phase:
Phase I
Contract:
n/a
Award Id:
13500
Agency Tracking Number:
13500
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
7855 S River Pkwy - Ste 103, Tempe, AZ, 85284
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
John Coulthard
(602) 491-8860
Business Contact:
() -
Research Institution:
n/a
Abstract
THIS PROPOSAL ADDRESSES THE TECHNICAL CHALLENGE TO U.S. INDUSTRY FOR DEVELOPMENT OF CONTROL SYSTEMS THAT ARE ADAPTABLE TO CHANGES IN THE COMPLEX MULTIPLE, CONCURRENT PROCESSES OF A SEMICONDUCTOR MANUFACTURING ENVIRONMENT. THE PROPOSED WORK IS EXPLORATORY RESEARCH WHICH WILL RESULT IN THE DEVELOPMENT OF AN ABSTRACT SETTING FOR THE CONTROL SYSTEMS, INVOLVING A THREE TIER HIERARCHICAL APPROACH, WITH EACH TIER BASED UPON A DISTINCT CONTROL METHODOLOGY. PROGRESSING OUTWARDS TOWARD THE SYSTEM OPERATOR, THESE TIERS WILL BE BASED ON TRADITIONAL PID AND PROCESS CONTROL, ADAPTIVE CONTROL SYSTEMS AND CONTROL FOR DISCRETE EVENT SYSTEMS. CONSIDERATION WILL BE GIVEN TO THE INCORPORATION OF EXPERT SYSTEMS, EMBEDDED PROCESS SIMULATORS AND NEURAL NETWORKS. THE ABSTRACT SETTING WILL PROVIDE A MEANS OF ANALYZING AN DESIGNING CONTROL SYSTEMS FOR THE COMPLEX SEMICONDUCTOR MANUFACTURING ENVIRONMENT. ANTICIPATED BENEFITS/POTENTIAL COMMERCIAL APPLICATIONS - ADVANCED CONTROL SYSTEMS FOR THE SEMICONDUCTOR MANUFACTURING ENVIRONMENT CAN BE CONSIDERED AN ENABLING TECHNOLOGY THAT OFFERS SIGNIFICANT POTENTIAL FOR PRODUCTIVITY IMPROVEMENT. THERE ARE OVER 350 WAFER FABRICATION SITES IN THE U.S. WHERE ADVANCED CONTROLS TECHNOLOGY INSERTION COULD RESULT IN IMPROVED YIELDS, THROUGHPUT, QUALITY, CYCLE TIMES AND PROCESS FLEXIBILITY. KEY WORDS - MANUFACTURING, ADAPTIVE CONTROL, HIERARCHICAL, CONTROL THEORY, PROCESS SIMULATION, AUTOMATION, SEMICONDUCTORS, MICROELECTRONICS

* information listed above is at the time of submission.

Agency Micro-sites


SBA logo

Department of Agriculture logo

Department of Commerce logo

Department of Defense logo

Department of Education logo

Department of Energy logo

Department of Health and Human Services logo

Department of Homeland Security logo

Department of Transportation logo

Enviromental Protection Agency logo

National Aeronautics and Space Administration logo

National Science Foundation logo
US Flag An Official Website of the United States Government