ADAPTIVE CONTROL AND HIERARCHICAL SYSTEMS FOR A COMPLES MANUFACTURING ENVIRONMENT

Award Information
Agency: Department of Defense
Branch: Defense Advanced Research Projects Agency
Contract: N/A
Agency Tracking Number: 13500
Amount: $50,000.00
Phase: Phase I
Program: SBIR
Awards Year: 1990
Solicitation Year: N/A
Solicitation Topic Code: N/A
Solicitation Number: N/A
Small Business Information
Semimac Inc
7855 S River Pkwy - Ste 103, Tempe, AZ, 85284
DUNS: N/A
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 John Coulthard
 (602) 491-8860
Business Contact
Phone: () -
Research Institution
N/A
Abstract
THIS PROPOSAL ADDRESSES THE TECHNICAL CHALLENGE TO U.S. INDUSTRY FOR DEVELOPMENT OF CONTROL SYSTEMS THAT ARE ADAPTABLE TO CHANGES IN THE COMPLEX MULTIPLE, CONCURRENT PROCESSES OF A SEMICONDUCTOR MANUFACTURING ENVIRONMENT. THE PROPOSED WORK IS EXPLORATORY RESEARCH WHICH WILL RESULT IN THE DEVELOPMENT OF AN ABSTRACT SETTING FOR THE CONTROL SYSTEMS, INVOLVING A THREE TIER HIERARCHICAL APPROACH, WITH EACH TIER BASED UPON A DISTINCT CONTROL METHODOLOGY. PROGRESSING OUTWARDS TOWARD THE SYSTEM OPERATOR, THESE TIERS WILL BE BASED ON TRADITIONAL PID AND PROCESS CONTROL, ADAPTIVE CONTROL SYSTEMS AND CONTROL FOR DISCRETE EVENT SYSTEMS. CONSIDERATION WILL BE GIVEN TO THE INCORPORATION OF EXPERT SYSTEMS, EMBEDDED PROCESS SIMULATORS AND NEURAL NETWORKS. THE ABSTRACT SETTING WILL PROVIDE A MEANS OF ANALYZING AN DESIGNING CONTROL SYSTEMS FOR THE COMPLEX SEMICONDUCTOR MANUFACTURING ENVIRONMENT. ANTICIPATED BENEFITS/POTENTIAL COMMERCIAL APPLICATIONS - ADVANCED CONTROL SYSTEMS FOR THE SEMICONDUCTOR MANUFACTURING ENVIRONMENT CAN BE CONSIDERED AN ENABLING TECHNOLOGY THAT OFFERS SIGNIFICANT POTENTIAL FOR PRODUCTIVITY IMPROVEMENT. THERE ARE OVER 350 WAFER FABRICATION SITES IN THE U.S. WHERE ADVANCED CONTROLS TECHNOLOGY INSERTION COULD RESULT IN IMPROVED YIELDS, THROUGHPUT, QUALITY, CYCLE TIMES AND PROCESS FLEXIBILITY. KEY WORDS - MANUFACTURING, ADAPTIVE CONTROL, HIERARCHICAL, CONTROL THEORY, PROCESS SIMULATION, AUTOMATION, SEMICONDUCTORS, MICROELECTRONICS

* information listed above is at the time of submission.

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