SBIR Phase I: High Volume MOCVD AlGaN Production Tool
Small Business Information
120 Centennial Avenue, Piscataway, NJ, 08854
AbstractThis Small Business Innovation Research (SBIR) Phase I Project will develop a high volume/high pressure RDR-MOCVD nitride production tool. Two fundamental problems will be addressed. The first is the need for large area substrate quality and the second is the need for large area/high volume MOCVD nitride epitaxy production tools. This project will demonstrate a scaleable tool to meet these needs. The commercial applications of this project will be in electronics and optoelectronic device markets.
* information listed above is at the time of submission.