SBIR Phase I: High Volume MOCVD AlGaN Production Tool

Award Information
Agency:
National Science Foundation
Amount:
$100,000.00
Program:
SBIR
Contract:
N/A
Solitcitation Year:
N/A
Solicitation Number:
N/A
Branch:
N/A
Award Year:
2002
Phase:
Phase I
Agency Tracking Number:
0128093
Solicitation Topic Code:
N/A
Small Business Information
Structured Materials Industries, Inc.
120 Centennial Avenue, Piscataway, NJ, 08854
Hubzone Owned:
N
Woman Owned:
N
Socially and Economically Disadvantaged:
N
Duns:
N/A
Principal Investigator
 Gary Tompa
 (732) 885-5909
 gstompa@aol.com
Business Contact
Phone: () -
Research Institution
N/A
Abstract
This Small Business Innovation Research (SBIR) Phase I Project will develop a high volume/high pressure RDR-MOCVD nitride production tool. Two fundamental problems will be addressed. The first is the need for large area substrate quality and the second is the need for large area/high volume MOCVD nitride epitaxy production tools. This project will demonstrate a scaleable tool to meet these needs. The commercial applications of this project will be in electronics and optoelectronic device markets.

* information listed above is at the time of submission.

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