SBIR Phase I: High Volume MOCVD AlGaN Production Tool

Award Information
Agency:
National Science Foundation
Branch
n/a
Amount:
$100,000.00
Award Year:
2002
Program:
SBIR
Phase:
Phase I
Contract:
n/a
Agency Tracking Number:
0128093
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
Structured Materials Industries, Inc.
120 Centennial Avenue, Piscataway, NJ, 08854
Hubzone Owned:
N
Socially and Economically Disadvantaged:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
Gary Tompa
(732) 885-5909
gstompa@aol.com
Business Contact:
() -
Research Institution:
n/a
Abstract
This Small Business Innovation Research (SBIR) Phase I Project will develop a high volume/high pressure RDR-MOCVD nitride production tool. Two fundamental problems will be addressed. The first is the need for large area substrate quality and the second is the need for large area/high volume MOCVD nitride epitaxy production tools. This project will demonstrate a scaleable tool to meet these needs. The commercial applications of this project will be in electronics and optoelectronic device markets.

* information listed above is at the time of submission.

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