SBIR Phase I: In Line Thin Film Battery (Cathode) Plasma Enhanced-Metal Organic Chemical Vapor Deposition (PE-MOCVD) Production Tool

Award Information
Agency:
National Science Foundation
Branch
n/a
Amount:
$100,000.00
Award Year:
2003
Program:
SBIR
Phase:
Phase I
Contract:
0319623
Award Id:
63761
Agency Tracking Number:
0319623
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
201 Circle Drive, Piscataway, NJ, 08854
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
Catherine Rice
() -
Business Contact:
() -
Research Institution:
n/a
Abstract
This Small Business Innovation Research Phase I project will demonstrate proof of concepts of a next generation plasma-enhanced low temperature in-line linear PE-MOCVD (Web coating) system for thin film batteries. The requisite thin film battery technology exists and prototyping of the same on a polymer substrate has begun. Presently, the major limitation is the ability to effectively manufacture the solid-state cathode. Present efforts have shown a low temperature PE-CVD approach to be the best; however, no such tool meeting all the needs exists today. In defined steps, a prototype of the needed tool will be made, which will be sold commercially. Thin-film rechargeable batteries have numerous possible applications as active or standby power sources for microelectronics. Examples of active power sources include MEMS devices, smart cards, remote sensors, miniature transmitters, and implantable medical devices. Standby power applications include PCMCIA cards and other types of CMOS-SRAM memory devices.

* information listed above is at the time of submission.

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