HYPOCYCLOIDAL PINCH (HCP) DEVICE FOR X-RAY LITHOGRAPHY

Award Information
Agency: National Science Foundation
Branch: N/A
Contract: N/A
Agency Tracking Number: 10707
Amount: $49,996.00
Phase: Phase I
Program: SBIR
Awards Year: 1989
Solicitation Year: N/A
Solicitation Topic Code: N/A
Solicitation Number: N/A
Small Business Information
Source Tek Inc
24 Carriage Hill Dr, Poquoson, VA, 23662
DUNS: N/A
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Sang H Choi
 Principal Investigator
 (804) 868-8949
Business Contact
Phone: () -
Research Institution
N/A
Abstract
THE EVOLUTION OF VLSIC TECHNOLOGY FURTHER DEMANDS INNOVATIVE AND FAST SUBMICRON LITHOGRAPHY WHICH COULD REPLICATE MORE DENSELY PACKED IC AT A HIGH THROUGHPUT. THE PROPOSED HYPOCYCLOIDAL PINCH (HCP) LIGHT SOURCE IS CONSIDERED TO BE AN INTENSE X-RAY SOURCE SUITABLE FOR SUBMICRON AND HIGH THROUGHPUT LITHOGRAPHY. THIS DEVICE HAS A NOVEL GEOMETRY WHICH UTILIZES THE PLASMA DYNAMICS HYPOCYCLOIDALLY PINCHED INTO THE RADIAL DIRECTION AND EVENTUALLY RESULTING IN A VERY STABLE, HIGH ENERGY, AND HIGHLY DENSE PLASMA IN ITS AXIAL CENTER. THE EMISSION SPECTRA FROM THIS HIGHLY COMPRESSED AND STABLE PLASMA IS COMPOSED MAINLY OF A WAVEBAND OF INTENSE SOFT X-RAY. THE SIZE OF PINCHED PLASMA IS SO SMALL IN DIAMETER THAT THE PENUMBRA EFFECT CAN BE ALSO MINIMIZED IN THE PHOTO-LITHOGRAPHY. THIS STABLE AND HIGHLY COMPRESSED PLASMA GUARANTEES THE REPRODUCIBILITY OF THE SOFT X-RAY EMISSION AND ITS INTENSE EMISSION ENSURES THE FAST THROUGHTPUT. THE PROPOSED HCP SOFT X-RAY LIGHT SOURCE IS ANINEXPENSIVE SYSTEM, SO THAT IT IS IDEAL FOR THE SMALL BUSINESS ENTITIES AND UNIVERSITY LABORATORIES.

* information listed above is at the time of submission.

Agency Micro-sites

SBA logo
Department of Agriculture logo
Department of Commerce logo
Department of Defense logo
Department of Education logo
Department of Energy logo
Department of Health and Human Services logo
Department of Homeland Security logo
Department of Transportation logo
Environmental Protection Agency logo
National Aeronautics and Space Administration logo
National Science Foundation logo
US Flag An Official Website of the United States Government