HYPOCYCLOIDAL PINCH (HCP) DEVICE FOR X-RAY LITHOGRAPHY

Award Information
Agency:
National Science Foundation
Branch
n/a
Amount:
$49,996.00
Award Year:
1989
Program:
SBIR
Phase:
Phase I
Contract:
n/a
Award Id:
10707
Agency Tracking Number:
10707
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
24 Carriage Hill Dr, Poquoson, VA, 23662
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
Sang H Choi
Principal Investigator
(804) 868-8949
Business Contact:
() -
Research Institution:
n/a
Abstract
THE EVOLUTION OF VLSIC TECHNOLOGY FURTHER DEMANDS INNOVATIVE AND FAST SUBMICRON LITHOGRAPHY WHICH COULD REPLICATE MORE DENSELY PACKED IC AT A HIGH THROUGHPUT. THE PROPOSED HYPOCYCLOIDAL PINCH (HCP) LIGHT SOURCE IS CONSIDERED TO BE AN INTENSE X-RAY SOURCE SUITABLE FOR SUBMICRON AND HIGH THROUGHPUT LITHOGRAPHY. THIS DEVICE HAS A NOVEL GEOMETRY WHICH UTILIZES THE PLASMA DYNAMICS HYPOCYCLOIDALLY PINCHED INTO THE RADIAL DIRECTION AND EVENTUALLY RESULTING IN A VERY STABLE, HIGH ENERGY, AND HIGHLY DENSE PLASMA IN ITS AXIAL CENTER. THE EMISSION SPECTRA FROM THIS HIGHLY COMPRESSED AND STABLE PLASMA IS COMPOSED MAINLY OF A WAVEBAND OF INTENSE SOFT X-RAY. THE SIZE OF PINCHED PLASMA IS SO SMALL IN DIAMETER THAT THE PENUMBRA EFFECT CAN BE ALSO MINIMIZED IN THE PHOTO-LITHOGRAPHY. THIS STABLE AND HIGHLY COMPRESSED PLASMA GUARANTEES THE REPRODUCIBILITY OF THE SOFT X-RAY EMISSION AND ITS INTENSE EMISSION ENSURES THE FAST THROUGHTPUT. THE PROPOSED HCP SOFT X-RAY LIGHT SOURCE IS ANINEXPENSIVE SYSTEM, SO THAT IT IS IDEAL FOR THE SMALL BUSINESS ENTITIES AND UNIVERSITY LABORATORIES.

* information listed above is at the time of submission.

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