SIMULTANEOUS SPUTTER-DEPOSITION/ION-IMPLAN- TATION PROCESS.

Award Information
Agency:
Department of Energy
Branch
n/a
Amount:
$49,991.00
Award Year:
1985
Program:
SBIR
Phase:
Phase I
Contract:
n/a
Award Id:
2485
Agency Tracking Number:
2485
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
Patriots Park, Bedford, MA, 02173
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
DR. PIRAN SIOSHANSI
PRINCIPAL INVESTIGATOR
(617) 275-6000
Business Contact:
() -
Research Institution:
n/a
Abstract
THE USE OF ION BEAMS AS A MEANS OF ENHANCING THE PROPERTIES OF DEPOSITED THIN FILMS HAS ATTRACTED CON- SIDERABLE INTEREST IN THE LAST FEW YEARS. FURTHER DEVELOPMENT OF ENERGETICALLY-ENHANCED, ION-DEPOS- TION TECHNIQUES IS EXPECTED TO RESULT IN A NEW GENERATION OF EXOTIC COATINGS WITH NEAR-THEORETICAL DENSITIES, VERY HIGH HARDNESS, AND, AT THE SAME TIME, A CAPACITY OF SELF-LUBRICATION. DEVELOPMENT OF A SIMULTANEOUS SPUTTER-COATING, ION-IMPLANTATION TECHNIQUE IS PLANNED FOR CREATION OF DIAMOND-LIKE THIN FILMS WITH EXCELLENT ADHESION AND PARAMETERS CLOSE TO THOSE OF THE BULK MATERIAL. IN THIS APPROACH, A THIN LAYER OF MATERIAL (FOR EXAMPLE, BORON) IS ION- SPUTTERED ONTO A SURFACE THAT IS CONCURRENTLY IM- PLANTED WITH A STEADY BEAM OF IONS (FOR EXAMPLE, NOTROGEN). THE COATINGS SYNTHESIZED BY THIS TECHNIQUE (FOR EXAMPLE, I-BN) ARE EXPECTED NOT ONLY TO BE EXTREMELY HARD AND WEAR-RESISTANT BUT TO TRANSFORM TO A SELF-LUBRICATING FORM UNDER LOAD. THIS TECHNIQUE IS EXPECTED TO BE USEFUL FOR DEPOSITION OF DIAMOND- LIKE COATINGS SUCH AS I-CARBON AND I-BORON NITRIDE AND ALSO SUCH REFRACTORY MATERIALS AS B4C, TIN, TIC AND TIB2.

* information listed above is at the time of submission.

Agency Micro-sites


SBA logo

Department of Agriculture logo

Department of Commerce logo

Department of Defense logo

Department of Education logo

Department of Energy logo

Department of Health and Human Services logo

Department of Homeland Security logo

Department of Transportation logo

Enviromental Protection Agency logo

National Aeronautics and Space Administration logo

National Science Foundation logo
US Flag An Official Website of the United States Government