IMPLANTATION/EXCIMER LASER ANNEALING FEASIBILITY STUDY

Award Information
Agency:
Department of Defense
Branch
Defense Advanced Research Projects Agency
Amount:
$63,678.00
Award Year:
1986
Program:
SBIR
Phase:
Phase I
Contract:
n/a
Award Id:
4417
Agency Tracking Number:
4417
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
Patriots Pk, Bedford, MA, 01730
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
STANLEY W VERNON
(617) 275-6000
Business Contact:
() -
Research Institution:
n/a
Abstract
THE LACK OF A PROCESS TO DOPE ZNS(X)SE(1-X) FOR P-TYPE CONDUCTIVITY IS THE MAJOR OBSTACLE TO THE ADVANCEMENT OF DEVICE TECHNOLOGY BASED ON WIDE BANDGAP P/N HOMOJUNCTIONS. OF PARTICULAR IMPORTANCE ARE LIGHT-EMITTING DIODES AND INJECTION LASERS FABRICATED FROM ZNSXSE(1-X) WHICH OPERATE IN THE BLUE OR ULTRAVIOLET REGIONS OF THE SPECTRUM, ESSENTIAL FOR SOME TYPES OF SOPHISTICATED COMMUNICATION. SPIRE PROPOSES TO DOPE ZNSXSE(1-X) GROWN BY METALORGANIC CHEMICAL VAPOR DEPOSITION P-TYPE BY ION IMPLANTATION, FOLLOWED BY EXCIMERLASER ANNEALING, WHICH WILL "QUENCH IN" DESIRABLE ACCEPTOR LEVELS AT CONCENTRATIONS PREVIOUSLY UNOBTAINABLE BY MORE CONVENTIONAL METHODS. THE PHASE I RESEARCH IS A FEASIBILITY STUDY OF THIS METHOD IN WHICH THE IONS (NITROGEN, VANADIUM, AND PHOSPHORUS) AND IMPLANTATION PARAMETERS WILL BE VARIED AFTER THE LASER PARAMETERS ARE OPTIMIZED. ELECTRICAL MEASUREMENTS WILL BE MADE TO DETERMINE CARRIER TYPE, CONCENTRATION, AND MOBILITY FROM ONE SET OF STRUCTURES, AND JUNCTION CHARACTERISTICS WILL BE MEASURED ON THE SECOND SET. FINALLY, THE EMPIRICAL RESULTS WILL BE COMPARED AND ASSESSED SO THAT THE SUPERIOR ROUTE(S) MAY BE PURSUED IN PHASE II RESEARCH.

* information listed above is at the time of submission.

Agency Micro-sites


SBA logo

Department of Agriculture logo

Department of Commerce logo

Department of Defense logo

Department of Education logo

Department of Energy logo

Department of Health and Human Services logo

Department of Homeland Security logo

Department of Transportation logo

Enviromental Protection Agency logo

National Aeronautics and Space Administration logo

National Science Foundation logo
US Flag An Official Website of the United States Government