SIMOX RADIATION HARD LINEAR BIPOLAR STRUCTURES

Award Information
Agency:
Department of Defense
Branch
Air Force
Amount:
$494,565.00
Award Year:
1991
Program:
SBIR
Phase:
Phase II
Contract:
n/a
Award Id:
10216
Agency Tracking Number:
10216
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
Patriots Park, Bedford, MA, 01730
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
Dr Nasser Karam
(617) 275-6000
Business Contact:
() -
Research Institute:
n/a
Abstract
THE OBJECTIVE OF THE PROPOSED RESEARCH PROGRAM IS TO DEVELOP A PROCESS FOR HETEROEPITAXIAL DEPOSITION OF INP ON SILICON-ON-INSULATOR WAFERS BY METALORGANIC CHEMICAL VAPOR DEPOSITON (MOCVD). INP IS AN EXCEPTIONALLY PROMISING SEMICONDUCTOR MATERIAL FOR RADIATION-HARD, HIGH-SPEED, AND OPTOELECTRONIC DEVICES. ITS PROMISE STEMS FROM HIGH ELECTRON SATURATION VELOCITY, RADIATION RESISTANCE, AND ROOM TEMPERATURE DEFECT ANNEALING QUALITIES. SIMOX (SEPARATION BY IMPLANTATION OF OXYGEN) IS CAPABLE OF PRODUCING LARGE AREA, HIGHQUALITY SUBSTRATES SUITABLE FOR HIGH-SPEED RADIATION-HARD DEVICES. COMPARED TO INP, SIMOX WAFERS HAVE VERY HIGH STRENGTH-TO-WEIGHT RATIO AND THERMAL CONDUCTIVITY. COMBINING THE TWO MATERIALS GROWING ON A SINGLE SUBSTRATE WOULD RESULT IN A HETEROSTRUCTURE WITH ALL THE POTENTIAL STRATEGIC MILITARY ADVANTAGES OF BOTH INP-ON-SI AND SOI. THIS RESEARCH EFFORT WILL DEVELOP A DEPOSITION PROCESS TO YIELD DEVICE QUALITY SINGLE CRYSTAL INP-ON-SIMOX, LEADING TO ADVANCED, RADIATION-HARD (NEUTRON TOLERANT) SUBSTRATES SUITABLE FOR FABRICATION OF RELIABLE ANALOG DEVICES. PHASE I WILL DEPOSIT SINGLE CRYSTALLINE INP ONTO SIMOX WAFERS AND CHARACTERIZE STRUCTURAL AND ELECTRICAL PROPERTIES OF THE FILMS. THIS WILL BE ACHIEVED BY COUPLING SPIRE'S EXPERIENCE IN PRODUCING HIGH-QUALITY SIMOX WAFERS WITH THAT OF DEPOSITING HIGH-QUALITY GAAS ON DIMOX AND INP-ON-SI. PHASE II WILL DEAL WITH OPTIMIZATION OF GROWTH PARAMETERS, DEMONSTRATION OF DEVICE QUALITY INP/SIMOX MATERIALS, AND FABRICATION OF INP/SIMOX MESFETS THAT CAN BE TESTED UNDER NEUTRON IRRADIATION FOR COMPARISON WITH THOSE FABRICATED DIRECTLY ON SILICON.

* information listed above is at the time of submission.

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