DEVELOPMENT OF A PLANETARY-MOTION MOCVD REACTOR

Award Information
Agency: Department of Defense
Branch: Air Force
Contract: N/A
Agency Tracking Number: 12995
Amount: $418,000.00
Phase: Phase II
Program: SBIR
Awards Year: 1991
Solitcitation Year: N/A
Solitcitation Topic Code: N/A
Solitcitation Number: N/A
Small Business Information
Spire Corp.
Patriots Pk, Bedford, MA, 01730
Duns: N/A
Hubzone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Stanley M Vernon
 (617) 275-6000
Business Contact
Phone: () -
Research Institution
N/A
Abstract
WE PROPOSE HERE THE DEVELOPMENT OF A METALORGANIC CHEMICAL VAPOR DEPOSITION (MOCVD) SYSTEM HAVING IMPROVED SAFETY ASPECTS AND SOURCEUTILIZATION EFFICIENCY. OUR NOVEL DESIGN EMPLOYS A PLANETARY-MOTION SUSCEPTOR WHICH IS ROTATED AND LEVITATED SOLEY BY GAS FLOW STREAMS. THIS LARGE-CAPACITY PRODUCTION REACTOR HOLDS UP TO SIX 4-INCH DIAMETER WAFERS PER BATCH, HAS A STAINLESS STEEL ENVELOPE FOR SAFETY, AND UTILIZES A WAFER-TRANSFER LOAD-LOCK MECHANISM FOR INCREASED SAFETY, THROUGHPUT, AND YEILD. THE UE OF A PLANETARY-MOTION SUSCEPTOR WITH A RADIALLY OUTWARD GAS-FLOW PATTERN ENABLES THE ACHIEVEMENT OF BOTH EXCELLENT GROWTH UNIFORMITY AND HIGH SOUCEUTILIZATION EFFICIENCY OVER A LARGE DEPOSITION AREA. THE PHASE I EFFORT WILL CONSIST OF DESIGNING THE DETAILS OF THIS SYSTEM AND CONSTRUCTING A SIMPLIFIED WORKING MODEL; COMPLETE SYSTEM FABRICATION, INSTALLATION AND OPERATION WILL OCCUR IN PHASE II. THE ESTABLISHMENT OF SUCH AN ADVANCED TECHNOLOGY WILL HELP INSURE THAT THE GOVERNMENT HAS A U.S.-BASED COMMERCIAL SUPPLY OF BOTH MOCVD SYSTEMS AND EPITAXIAL WAFERS.

* information listed above is at the time of submission.

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