DEVELOPMENT OF A PLANETARY-MOTION MOCVD REACTOR

Award Information
Agency:
Department of Defense
Branch
Air Force
Amount:
$418,000.00
Award Year:
1991
Program:
SBIR
Phase:
Phase II
Contract:
n/a
Award Id:
12995
Agency Tracking Number:
12995
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
Spire Corp. (Currently Spire Corporation)
Patriots Pk, Bedford, MA, 01730
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
Stanley M Vernon
(617) 275-6000
Business Contact:
() -
Research Institution:
n/a
Abstract
WE PROPOSE HERE THE DEVELOPMENT OF A METALORGANIC CHEMICAL VAPOR DEPOSITION (MOCVD) SYSTEM HAVING IMPROVED SAFETY ASPECTS AND SOURCEUTILIZATION EFFICIENCY. OUR NOVEL DESIGN EMPLOYS A PLANETARY-MOTION SUSCEPTOR WHICH IS ROTATED AND LEVITATED SOLEY BY GAS FLOW STREAMS. THIS LARGE-CAPACITY PRODUCTION REACTOR HOLDS UP TO SIX 4-INCH DIAMETER WAFERS PER BATCH, HAS A STAINLESS STEEL ENVELOPE FOR SAFETY, AND UTILIZES A WAFER-TRANSFER LOAD-LOCK MECHANISM FOR INCREASED SAFETY, THROUGHPUT, AND YEILD. THE UE OF A PLANETARY-MOTION SUSCEPTOR WITH A RADIALLY OUTWARD GAS-FLOW PATTERN ENABLES THE ACHIEVEMENT OF BOTH EXCELLENT GROWTH UNIFORMITY AND HIGH SOUCEUTILIZATION EFFICIENCY OVER A LARGE DEPOSITION AREA. THE PHASE I EFFORT WILL CONSIST OF DESIGNING THE DETAILS OF THIS SYSTEM AND CONSTRUCTING A SIMPLIFIED WORKING MODEL; COMPLETE SYSTEM FABRICATION, INSTALLATION AND OPERATION WILL OCCUR IN PHASE II. THE ESTABLISHMENT OF SUCH AN ADVANCED TECHNOLOGY WILL HELP INSURE THAT THE GOVERNMENT HAS A U.S.-BASED COMMERCIAL SUPPLY OF BOTH MOCVD SYSTEMS AND EPITAXIAL WAFERS.

* information listed above is at the time of submission.

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