PYROELECTRIC DETECTORS BY EPITAXIAL CVD GROWTH ON SILICON

Award Information
Agency: National Aeronautics and Space Administration
Branch: N/A
Contract: N/A
Agency Tracking Number: 17020
Amount: $49,655.00
Phase: Phase I
Program: SBIR
Awards Year: 1991
Solicitation Year: N/A
Solicitation Topic Code: N/A
Solicitation Number: N/A
Small Business Information
Spire Corp
Patriots Park, Bedford, MA, 01730
DUNS: N/A
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 () -
Business Contact
Phone: () -
Research Institution
N/A
Abstract
NON-CRYOGENIC, INFRARED DETECTOR ARRAYS SUITABLE FOR OPERATION BETWEEN 10 AND 16 MICRONS CAN BE FABRICATED FROM PYRO-ELECTRIC THIN FILMS, SUCH AS STRONTIUM-BARIUM NIOBATE. DETECTOR SENSITIVITY, HOWEVER, IS LIMITED BY FILM THICKNESS. SENSITIVITY CAN BE INCREASED BY DECREASING FILM THICKNESS, BUT MANUFACTURING TECHNOLOGY CURRENTLY SETS A LIMIT BELOW WHICH THICKNESS CANNOT BE REDUCED. METALORGANICCHEMICAL VAPOR DEPOSITION (MOCVD) WILL BE EXPLORED AS A MEANS OF REMOVING THIS RESTRICTION, MAKING POSSIBLE A NEW CLASS OF MORE SENSITIVE, NON-CRYOGENIC, INFRARED DETECTORS. THE EFFORT WILL CAPITALIZE ON RECENT DEVELOPMENTS IN THIN-FILM SUPERCONDUCTOR TECHNOLOGY TO GROW (SRBA)NB2 AND RELATED COMPOUNDS. MOCVD-COMPATIBLE BARIUM AND STRONTIUM PRECURSORS HAVE BEEN SYNTHESIZED WITHIN THE PAST YEAR, AND ARE NOW AVAILABLE IN LIMITED QUANTITIES. THEY WILL BE USED TO DEPOSIT FILMS ON SILICON AND SAPPHIRE SUBSTRATES, AND THE RESULTING FILMS WILL BE CHARACTERIZED WITH RESPECT TO COMPOSITION, STRUCTURE, AND THERMAL AND ELECTRICAL PROPERTIES. NON-CRYOGENIC, INFRARED DETECTOR ARRAYS SUITABLE FOR OPERATION BETWEEN 10 AND 16 MICRONS CAN BE FABRICATED FROM PYRO-ELECTRIC THIN FILMS, SUCH AS STRONTIUM-BARIUM NIOBATE. DETECTOR SENSITIVITY, HOWEVER, IS LIMITED BY FILM THICKNESS. SENSITIVITY CAN BE INCREASED BY DECREASING FILM THICKNESS, BUT MANUFACTURING TECHNOLOGY CURRENTLY SETS A LIMIT BELOW WHICH THICKNESS CANNOT BE REDUCED. METALORGANICCHEMICAL VAPOR DEPOSITION (MOCVD) WILL BE EXPLORED AS A MEANS OF REMOVING THIS RESTRICTION, MAKING POSSIBLE A NEW CLASS OF MORE SENSITIVE, NON-CRYOGENIC, INFRARED DETECTORS. THE EFFORT WILL CAPITALIZE ON RECENT DEVELOPMENTS IN THIN-FILM SUPERCONDUCTOR TECHNOLOGY TO GROW (SRBA)NB2 AND RELATED COMPOUNDS. MOCVD-COMPATIBLE BARIUM AND STRONTIUM PRECURSORS HAVE BEEN SYNTHESIZED WITHIN THE PAST YEAR, AND ARE NOW AVAILABLE IN LIMITED QUANTITIES. THEY WILL BE USED TO DEPOSIT FILMS ON SILICON AND SAPPHIRE SUBSTRATES, AND THE RESULTING FILMS WILL BE CHARACTERIZED WITH RESPECT TO COMPOSITION, STRUCTURE, AND THERMAL AND ELECTRICAL PROPERTIES.

* information listed above is at the time of submission.

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