Hermetically Sealed Susceptors for Wafer Fabrication Lines

Award Information
Agency:
National Science Foundation
Branch
n/a
Amount:
$64,919.00
Award Year:
1995
Program:
SBIR
Phase:
Phase I
Contract:
9461206
Award Id:
29978
Agency Tracking Number:
29978
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
One Patriots Park, Bedford, MA, 01730
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
Piran Sioshansi
() -
Business Contact:
() -
Research Institution:
n/a
Abstract
N/A

* information listed above is at the time of submission.

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