MULTIPLE ION IMPLANTATION OF BURIED LAYERS FOR SILICON-ON-INSULATOR

Award Information
Agency:
Department of Defense
Branch
Missile Defense Agency
Amount:
$54,308.00
Award Year:
1987
Program:
SBIR
Phase:
Phase I
Contract:
n/a
Agency Tracking Number:
6478
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
Spire Corp.
Patriots Pk, Bedford, MA, 01730
Hubzone Owned:
N
Socially and Economically Disadvantaged:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
Stephen N Bunker
(617) 275-6000
Business Contact:
() -
Research Institution:
n/a
Abstract
N/A

* information listed above is at the time of submission.

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