High Temperature MEMS Sensor Suite for Aero-propulsion and Power Technologies

Award Information
Agency:
Department of Defense
Branch
Air Force
Amount:
$99,368.00
Award Year:
2005
Program:
SBIR
Phase:
Phase I
Contract:
FA8650-05-M-2588
Award Id:
73096
Agency Tracking Number:
F051-192-2006
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
515 Courtney Way Suite B, Lafayette, CO, 80026
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
128688111
Principal Investigator:
Wenge Zhang
VP of R&D
(303) 516-9075
wenge@sporian.com
Business Contact:
Bill Garrett
VP of Operations
(303) 516-9075
bill@sporian.com
Research Institution:
n/a
Abstract
To improve the working performance, increase efficiency, reduce pollution, reduce cost, and monitor the engine health status of gas turbine engines and advanced propulsion systems, miniaturized, robust sensors would be highly advantageous for measuring and monitoring physical parameters, such as pressure, temperature, flow. The end objective of this proposed work is to develop, single, high temperature (1300 C), MEMS, silicon carbide nitride (SiCN)-based temperature, pressure, and flow sensor suite suitable for a wide range a uses in gas turbine engines and advanced propulsion system applications. Our technical approach is to use SiCN, a new class of high temperature ceramic materials, which possess excellent mechanical and electric properties at high temperatures. In addition, the various processing technologies, such as photolithography, DRIE etching, injection molding, embossing, and precise machining can be utilized for the fabrication of the SiCN MEMS devices. Work tasks will include the evaluations of: material electrical properties, existing and new sensor designs, process techniques and suitability, and analytical and numerical modeling for design verification. Technical challenges lie in that the sensors have to survive extremely harsh working conditions, including high temperatures (as high as 3000¿F), elevated pressures, pressure oscillations, corrosive environments, surface coating or fouling, and high particulate loading.

* information listed above is at the time of submission.

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