High Temperature MEMS Sensor Suite for Aero-propulsion and Power Technologies

Award Information
Agency:
Department of Defense
Amount:
$99,368.00
Program:
SBIR
Contract:
FA8650-05-M-2588
Solitcitation Year:
2005
Solicitation Number:
2005.1
Branch:
Air Force
Award Year:
2005
Phase:
Phase I
Agency Tracking Number:
F051-192-2006
Solicitation Topic Code:
AF05-192
Small Business Information
SPORIAN MICROSYSTEMS, INC.
515 Courtney Way Suite B, Lafayette, CO, 80026
Hubzone Owned:
N
Woman Owned:
N
Socially and Economically Disadvantaged:
N
Duns:
128688111
Principal Investigator
 Wenge Zhang
 VP of R&D
 (303) 516-9075
 wenge@sporian.com
Business Contact
 Bill Garrett
Title: VP of Operations
Phone: (303) 516-9075
Email: bill@sporian.com
Research Institution
N/A
Abstract
To improve the working performance, increase efficiency, reduce pollution, reduce cost, and monitor the engine health status of gas turbine engines and advanced propulsion systems, miniaturized, robust sensors would be highly advantageous for measuring and monitoring physical parameters, such as pressure, temperature, flow. The end objective of this proposed work is to develop, single, high temperature (1300 C), MEMS, silicon carbide nitride (SiCN)-based temperature, pressure, and flow sensor suite suitable for a wide range a uses in gas turbine engines and advanced propulsion system applications. Our technical approach is to use SiCN, a new class of high temperature ceramic materials, which possess excellent mechanical and electric properties at high temperatures. In addition, the various processing technologies, such as photolithography, DRIE etching, injection molding, embossing, and precise machining can be utilized for the fabrication of the SiCN MEMS devices. Work tasks will include the evaluations of: material electrical properties, existing and new sensor designs, process techniques and suitability, and analytical and numerical modeling for design verification. Technical challenges lie in that the sensors have to survive extremely harsh working conditions, including high temperatures (as high as 3000°F), elevated pressures, pressure oscillations, corrosive environments, surface coating or fouling, and high particulate loading.

* information listed above is at the time of submission.

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