Novel High-Turbine Operational SiCN MEMS Sensor Suite

Award Information
Agency: Department of Defense
Branch: Navy
Contract: N68335-07-C-0038
Agency Tracking Number: N062-111-0021
Amount: $149,973.00
Phase: Phase I
Program: SBIR
Awards Year: 2007
Solicitation Year: 2006
Solicitation Topic Code: N06-111
Solicitation Number: 2006.2
Small Business Information
515 Courtney Way Suite B, Lafayette, CO, 80026
DUNS: 128688111
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Kevin Harsh
 Senior Scientist
 (303) 516-9075
Business Contact
 Brian Schaible
Title: president
Phone: (303) 516-9075
Research Institution
To improve the working performance, increase efficiency, reduce pollution, reduce cost, and monitor and track engine health status and failure modes of turbine engines and advanced propulsion systems, miniaturized, robust sensing systems for measuring and monitoring physical parameters, such as pressure and temperature, would be highly advantageous. The end objective of this proposed work to develop a single MEMS silicon carbide nitride (SiCN)-based pressure and temperature sensor, and packaging technology suitable for a wide range of turbine engines applications, with an operational range to 1400°C, and the ability to survive short duration (5-10 minute) temperature excursions to 1800°C. Our technical approach is to leverage a proprietary sensor technology based on SiCN, a new class of high temperature ceramic materials, which possess excellent mechanical and electric properties at high temperatures. Work tasks will translating the existing technology for this application, including: modifying material formulations, evaluating and defining sensor designs, evaluating and modifying fabrication processes, evaluating and defining the packaging/interface, and proof of principle feasibility experiments. Based on conversations with GE Aviation, for Phase I, we have initially targeted the GE-T64 engine system as the initial representative engine system, and several specific locations of interest within that engine.

* Information listed above is at the time of submission. *

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