Large Area Domain Engineered Thin Film Pyroelectric Detectors

Award Information
Agency:
Department of Commerce
Branch
National Institute of Standards and Technology
Amount:
$299,999.00
Award Year:
2009
Program:
SBIR
Phase:
Phase II
Contract:
n/a
Award Id:
84364
Agency Tracking Number:
110-08
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
2724 Sawbury Blvd., Columbus, OH, 43235
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
() -
Business Contact:
() -
Research Institution:
n/a
Abstract
This Small Business Innovation Research Phase II project uses the ¿smart-cut¿ methods to produce high performance and advanced functionality lithium tantalate pyroelectric sensors. Phase I has been devoted to feasibility demonstration of the ¿smart-cut¿ process, preliminary design studies for the advanced pyroelectric detectors and prototype device fabrication and testing. The Phase I effort resulted in the first reported crystal ion slicing of lithium tantalate films. An ion sliced lithium tantalate film was successfully transferred to a silicon substrate. A bond process was developed to scale up the thin lithium tantalate film-on-silicon process to wafer scale. The large areas and film thickness targeted in this work will result in especially large aspect ratio detectors. The results of the Phase I effort have established the building blocks for the actual development and production in Phase II of a commercial prototype pyroelectric detector with significantly improved performance.

* information listed above is at the time of submission.

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