Large Area Domain Engineered Thin Film Pyroelectric Detectors

Award Information
Agency: Department of Commerce
Branch: National Institute of Standards and Technology
Contract: N/A
Agency Tracking Number: 110-08
Amount: $299,999.00
Phase: Phase II
Program: SBIR
Awards Year: 2009
Solicitation Year: N/A
Solicitation Topic Code: N/A
Solicitation Number: N/A
Small Business Information
2724 Sawbury Blvd., Columbus, OH, 43235
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 () -
Business Contact
Phone: () -
Research Institution
This Small Business Innovation Research Phase II project uses the ¿smart-cut¿ methods to produce high performance and advanced functionality lithium tantalate pyroelectric sensors. Phase I has been devoted to feasibility demonstration of the ¿smart-cut¿ process, preliminary design studies for the advanced pyroelectric detectors and prototype device fabrication and testing. The Phase I effort resulted in the first reported crystal ion slicing of lithium tantalate films. An ion sliced lithium tantalate film was successfully transferred to a silicon substrate. A bond process was developed to scale up the thin lithium tantalate film-on-silicon process to wafer scale. The large areas and film thickness targeted in this work will result in especially large aspect ratio detectors. The results of the Phase I effort have established the building blocks for the actual development and production in Phase II of a commercial prototype pyroelectric detector with significantly improved performance.

* Information listed above is at the time of submission. *

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