Surface Micromachined Arrays of Transition-Edge Detectors

Award Information
Agency:
National Aeronautics and Space Administration
Branch
n/a
Amount:
$69,942.00
Award Year:
2004
Program:
SBIR
Phase:
Phase I
Contract:
NNG04CA75C
Agency Tracking Number:
033308
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
STAR Cryoelectronics LLC
25-A Bisbee Court, Santa Fe, NM, 87508
Hubzone Owned:
N
Socially and Economically Disadvantaged:
N
Woman Owned:
N
Duns:
071331768
Principal Investigator:
Robin Cantor
Principal Investigator
(505) 424-6454
rcantor@starcryo.com
Business Contact:
Robin Cantor
President
(505) 424-6454
rcantor@starcryo.com
Research Institution:
n/a
Abstract
An innovative surface micromachining technique is described for the fabrication of closely-packed arrays of transition edge sensor (TES) x-ray microcalorimeters. This technique enables individual TES microcalorimeters to be suspended on a thin membrane for thermal isolation from the bath temperature. The TES detectors are fabricated from normal metal/superconductor bilayers with a transition temperature of around 0.1 K. The proposed surface micromachining technique will simplify the fabrication of closely-packed TES microcalorimeter arrays, which are needed for numerous applications in astronomical x-ray spectroscopy.

* information listed above is at the time of submission.

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