Surface Micromachined Arrays of Transition-Edge Detectors

Award Information
Agency: National Aeronautics and Space Administration
Branch: N/A
Contract: NNG04CA75C
Agency Tracking Number: 033308
Amount: $69,942.00
Phase: Phase I
Program: SBIR
Awards Year: 2004
Solicitation Year: N/A
Solicitation Topic Code: N/A
Solicitation Number: N/A
Small Business Information
STAR Cryoelectronics LLC
25-A Bisbee Court, Santa Fe, NM, 87508
DUNS: 071331768
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Robin Cantor
 Principal Investigator
 (505) 424-6454
 rcantor@starcryo.com
Business Contact
 Robin Cantor
Title: President
Phone: (505) 424-6454
Email: rcantor@starcryo.com
Research Institution
N/A
Abstract
An innovative surface micromachining technique is described for the fabrication of closely-packed arrays of transition edge sensor (TES) x-ray microcalorimeters. This technique enables individual TES microcalorimeters to be suspended on a thin membrane for thermal isolation from the bath temperature. The TES detectors are fabricated from normal metal/superconductor bilayers with a transition temperature of around 0.1 K. The proposed surface micromachining technique will simplify the fabrication of closely-packed TES microcalorimeter arrays, which are needed for numerous applications in astronomical x-ray spectroscopy.

* information listed above is at the time of submission.

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