Superconducting Tunnel Junction Arrays for UV Photon Detection

Award Information
Agency: National Aeronautics and Space Administration
Branch: N/A
Contract: NNG05CA83C
Agency Tracking Number: 040430
Amount: $69,955.00
Phase: Phase I
Program: SBIR
Awards Year: 2005
Solicitation Year: 2004
Solicitation Topic Code: S2.05
Solicitation Number: N/A
Small Business Information
25-A Bisbee Court, Santa Fe, NM, 87508-1412
DUNS: 071331768
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Robin Cantor
 Principal Investigator
 (505) 424-6454
Business Contact
 Robin Cantor
Title: President
Phone: (505) 424-6454
Research Institution
An innovative method is described for the fabrication of superconducting tunnel junction (STJ) detector arrays offering true "three dimensional" imaging throughout the UV, visible and near-IR spectrum. Current state-of-the-art STJ detectors are fabricated from thin epitaxial Ta films that must be deposited at high temperatures on sapphire substrates. The subsequent metal films necessary to complete the STJ may be deposited at ambient temperature, but all of these films must be deposited uniformly with low stress and tight thickness control if acceptable device yields are to be achieved. We propose to develop a reliable and reproducible Ta STJ fabrication process using an advanced thin-film deposition tool that features a precision backside heater for reproducible depositions of high-quality epitaxial films and computer-controlled deposition modes that ensure excellent reproducibility and film uniformity (better than 98%) across an entire wafer. The combination of these unique deposition features is essential for the reproducible fabrication of reliable STJ detector arrays with uniform device properties and high production yields.

* Information listed above is at the time of submission. *

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